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Polymer MEMS actuators for underwater micromanipulation

文献类型:期刊论文

作者J.W.L. Zhou; Ho-Yin Chan; T.K.H. To; K.W.C. Lai; Li WJ(李文荣)
刊名IEEE/ASME Transactions on Mechatronics
出版日期2004
卷号9期号:2页码:334-342
ISSN号1083-4435
产权排序3
中文摘要Conventional MEMS actuators are not suitable for underwater applications such as cell grasping due to two main reasons: 1) their required actuation voltage are typically higher than 2 V, which would cause electrolysis in water and 2) they have small displacement/deflection due to their inherent driving principles. In this paper, three-different types of novel polymer-based MEMS underwater actuators developed in our laboratory are discussed: 1) ionic conducting polymer films (ICPF) actuator, which actuates by stress gradient induced by ionic movement due to electric field; 2) parylene thermal actuator, which actuates due to the induced stress gradient across a structure made of different layers of materials with different thermal expansion coefficients; and 3) polyaniline (PANI) actuator, which actuates due to its volumetric change caused by a reversible electrochemical oxidation-reduction (redox) reaction. All these polymer micro actuators can be actuated underwater with large deflections and require less power input than conventional MEMS actuators. The experimental results from characterizing these prototype actuators are presented in this paper.
收录类别SCI ; EI
语种英语
WOS记录号WOS:000222256500004
公开日期2012-05-29
源URL[http://ir.sia.cn/handle/173321/7393]  
专题沈阳自动化研究所_机器人学研究室
推荐引用方式
GB/T 7714
J.W.L. Zhou,Ho-Yin Chan,T.K.H. To,et al. Polymer MEMS actuators for underwater micromanipulation[J]. IEEE/ASME Transactions on Mechatronics,2004,9(2):334-342.
APA J.W.L. Zhou,Ho-Yin Chan,T.K.H. To,K.W.C. Lai,&Li WJ.(2004).Polymer MEMS actuators for underwater micromanipulation.IEEE/ASME Transactions on Mechatronics,9(2),334-342.
MLA J.W.L. Zhou,et al."Polymer MEMS actuators for underwater micromanipulation".IEEE/ASME Transactions on Mechatronics 9.2(2004):334-342.

入库方式: OAI收割

来源:沈阳自动化研究所

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