Positioning tables for nanofabrication
文献类型：期刊论文
| 作者 | Yuan PZ(原培章); Li XF(李小凡) ; Wang Z(王忠); Yao C(姚辰); Luo Y(罗宇)
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| 刊名 | International Journal of Nonlinear Sciences and Numerical Simulation
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| 出版日期 | 2002 |
| 卷号 | 3期号:3-4页码:477-479 |
| ISSN号 | 1565-1339 |
| 产权排序 | 1 |
| 中文摘要 | Based on different drive ideas, two nanometer-level positioning tables have been studying. At present there are internationally several new ideas/approaches to this field, such as drives by vibration or impact or on walking. A new idea of drive is thus proposed in this article, i.e. the Collision Drive. It is proved theoretically that the precision of positioning tables depends on the square of the mass ratio of a body to the other one in collision with the former. Therefore, a new approach has been found to improving the precision, and the effectiveness of "collision drive" was proved by model testings for its action principle. A nanometer-level positioning table was developed for the machining with MEMS, of which its precision was finally up to 20 nm with macro and micro adjustment ranges provided. |
| 语种 | 英语 |
| 公开日期 | 2012-05-29 |
| 源URL | [http://ir.sia.cn/handle/173321/7394]  |
| 专题 | 沈阳自动化研究所_机器人学研究室 |
| 推荐引用方式 GB/T 7714 | Yuan PZ,Li XF,Wang Z,et al. Positioning tables for nanofabrication[J]. International Journal of Nonlinear Sciences and Numerical Simulation,2002,3(3-4):477-479. |
| APA | Yuan PZ,Li XF,Wang Z,Yao C,&Luo Y.(2002).Positioning tables for nanofabrication.International Journal of Nonlinear Sciences and Numerical Simulation,3(3-4),477-479. |
| MLA | Yuan PZ,et al."Positioning tables for nanofabrication".International Journal of Nonlinear Sciences and Numerical Simulation 3.3-4(2002):477-479. |
入库方式： OAI收割
来源：沈阳自动化研究所
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