CNTs as Ultra-Low-Powered Aqueous Flow Sensors in PDMS Microfluidic Systems
文献类型：会议论文
| 作者 | Qu YL(曲艳丽) ; M. X. Ouyang; Li WJ(李文荣); Xuliang Han
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| 出版日期 | 2007 |
| 会议名称 | The 1st IEEE International Conference on Nano/Molecular Medicine and Engineering (NANO-MED) |
| 会议日期 | August 6-9, 2007 |
| 会议地点 | Macau SAR, China |
| 关键词 | Aqueous Flow Sensor Carbon Nanotubes CNT Sensor Microfluidic System Ultra-Low-Powered Sensor |
| 页码 | 4 pp. |
| 中文摘要 | We have developed ultra-low-powered CNT aqueous flow sensors integrated in microfluidic channels using MEMS-compatible fabrication technology. The sensors are first built on a glass substrate with microelectrode array. Electronic-Grade CNTs (EG-CNTs) are then aligned between the microelectrodes using AC dielectrophoretic (DEP) technique, which are utilized as sensing elements. The EG-CNTs exhibit very stable adhesion to the electrodes, therefore greatly increase the repeatability of the sensors. The CNT sensors are enclosed in a microfluidic chamber by bonding a polydimethylsiloxane (PDMS) microchannel to the glass substrate with the CNT sensor array. We demonstrated the response of the CNT flow sensor to different aqueous flow rates at room temperature. The sensors only needed ultra-low-power (~1μW) to detect the DI-water flow rate ranging from 0.8ms-1 to 2.1ms-1. Preliminary experiments show that there is a linear relation between the resistance changing ratio of the sensor and the flow rate. Our sensors show hysteresis of ~ 10% before temperature compensation. Based on our results, we proved the feasibility of utilizing CNTs as aqueous flow sensors with ultra-low-power consumption. Meanwhile, our results show great potentials of CNTs-based flow sensor for microfluidic, biomedical and bio-molecular applications. |
| 产权排序 | 1 |
| 会议主办者 | IEEE |
| 会议录 | The 1st IEEE International Conference on Nano/Molecular Medicine and Engineering (NANO-MED)
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| 会议录出版者 | IEEE |
| 会议录出版地 | New York |
| 语种 | 英语 |
| 源URL | [http://ir.sia.cn/handle/173321/8602]  |
| 专题 | 沈阳自动化研究所_机器人学研究室 |
| 推荐引用方式 GB/T 7714 | Qu YL,M. X. Ouyang,Li WJ,et al. CNTs as Ultra-Low-Powered Aqueous Flow Sensors in PDMS Microfluidic Systems[C]. 见:The 1st IEEE International Conference on Nano/Molecular Medicine and Engineering (NANO-MED). Macau SAR, China. August 6-9, 2007. |
入库方式： OAI收割
来源：沈阳自动化研究所
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