MEMS-fabricated ICPF actuators for biological manipulation
文献类型：会议论文
| 作者 | Zhou,Wenli; Li WJ(李文荣) ; Mai,John D.
|
| 出版日期 | 2003 |
| 会议名称 | SmaRT Structures and Materials 2003: Electroactive Polymer Actuators and Devices (EAPAD) |
| 会议日期 | March 3-6, 2003 |
| 关键词 | ionic conducting polymer film (ICPF) polymer micro actuator biological micromanipulation |
| 页码 | 332-337 |
| 中文摘要 | Ionic Conducting Polymer Film (ICPF) micro grippers with multi-finger configurations were developed using spin-on Nafion and photolithographic technology. A commercial solution from Dupont Co. (Nafion SE-5012) was used to prepare ~0.2 µm thick ionic conducting polymer film. Micro cantilever structures were fabricated which composed of Au/Nafion/Au film layers. Grippers with 2-finger and 4-finger configurations were successfully developed. We haveproved that the 2-fingered grippers can be actuated in water at ~5V DC voltages. The smallest 4-fingered grippers fabricated were 30 µm wide, 300 µm long and 0.4 µm thick for each finger. In addition, another interesting actuation behavior of the micro actuator was observed during fabrication. The actuators would curl up whenever they came in contact with water during the sacrificial release process. The curling process reversed instantaneously when theactuators are immersed in acid. We suggest that this phenomenon is probably due to the different volume expansions of Nafion in different medium. Besides, the current-voltage property was measured. We are further studying the consistency of their behaviors to modify the design and fabrication process for potential use in biological manipulations. |
| 收录类别 | EI |
| 产权排序 | 2 |
| 会议主办者 | SPIE |
| 会议录 | Proc. SPIE
 |
| 会议录出版者 | SPIE |
| 会议录出版地 | BELLINGHAM |
| 语种 | 英语 |
| 源URL | [http://ir.sia.cn/handle/173321/8773]  |
| 专题 | 沈阳自动化研究所_机器人学研究室 |
| 推荐引用方式 GB/T 7714 | Zhou,Wenli,Li WJ,Mai,John D.. MEMS-fabricated ICPF actuators for biological manipulation[C]. 见:SmaRT Structures and Materials 2003: Electroactive Polymer Actuators and Devices (EAPAD). March 3-6, 2003. |
入库方式： OAI收割
来源：沈阳自动化研究所
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