Coaxial positioning system based on flexible decoupling beams and micro-vision
文献类型：期刊论文
| 作者 | Chen, Tao ; Chen, Li-Guo ; Pan, Ming-Qiang ; Sun, Li-Ning |
| 刊名 | Guangxue Jingmi Gongcheng/Optics and Precision Engineering.
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| 出版日期 | 2011 |
| 卷号 | 19期号:11页码:2685-2692 |
| 关键词 | flexible decoupling beam micro-vision coaxial positioning |
| ISSN号 | 1004924X |
| 通讯作者 | Chen, T.(cht22@sina.com) |
| 收录类别 | EI-128 |
| 语种 | 中文 |
| 公开日期 | 2012-08-23 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/109215]  |
| 专题 | 上海微系统与信息技术研究所_微系统技术_期刊论文 |
| 推荐引用方式 GB/T 7714 | Chen, Tao,Chen, Li-Guo,Pan, Ming-Qiang,et al. Coaxial positioning system based on flexible decoupling beams and micro-vision[J]. Guangxue Jingmi Gongcheng/Optics and Precision Engineering.,2011,19(11):2685-2692. |
| APA | Chen, Tao,Chen, Li-Guo,Pan, Ming-Qiang,&Sun, Li-Ning.(2011).Coaxial positioning system based on flexible decoupling beams and micro-vision.Guangxue Jingmi Gongcheng/Optics and Precision Engineering.,19(11),2685-2692. |
| MLA | Chen, Tao,et al."Coaxial positioning system based on flexible decoupling beams and micro-vision".Guangxue Jingmi Gongcheng/Optics and Precision Engineering. 19.11(2011):2685-2692. |
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