A shielded cantilever-tip microwave probe for MICRO/NANO surface imaging of conductive properties
文献类型：期刊论文
| 作者 | Yang, Y.L. ; Lai, K.J. ; Tang, Q.C. ; Kundhikanjana, W. ; Kelly, M. ; Shen, Z.X. ; Li,XX |
| 刊名 | Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS).2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011
 |
| 出版日期 | 2011 |
| 页码 | 79-82 |
| ISSN号 | 10846999 |
| 通讯作者 | Yang, Y. L. |
| 收录类别 | EI-091 |
| 语种 | 英语 |
| 公开日期 | 2012-08-23 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/109216]  |
| 专题 | 上海微系统与信息技术研究所_微系统技术_期刊论文 |
| 推荐引用方式 GB/T 7714 | Yang, Y.L.,Lai, K.J.,Tang, Q.C.,et al. A shielded cantilever-tip microwave probe for MICRO/NANO surface imaging of conductive properties[J]. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS).2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011,2011:79-82. |
| APA | Yang, Y.L..,Lai, K.J..,Tang, Q.C..,Kundhikanjana, W..,Kelly, M..,...&Li,XX.(2011).A shielded cantilever-tip microwave probe for MICRO/NANO surface imaging of conductive properties.Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS).2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011,79-82. |
| MLA | Yang, Y.L.,et al."A shielded cantilever-tip microwave probe for MICRO/NANO surface imaging of conductive properties".Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS).2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011 (2011):79-82. |
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