A single-wafer-based single-sided bulk-micromachining technique for high-yield and low-cost volume production of pressure sensors
文献类型：期刊论文
| 作者 | Wang, Jiachou ; Li, XX |
| 刊名 | 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11.2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
 |
| 出版日期 | 2011 |
| 期号 | 0页码:410-413 |
| 通讯作者 | Li, X.(xxli@mail.sim.ac.cn) |
| 公开日期 | 2012-08-23 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/109217]  |
| 专题 | 上海微系统与信息技术研究所_微系统技术_期刊论文 |
| 推荐引用方式 GB/T 7714 | Wang, Jiachou,Li, XX. A single-wafer-based single-sided bulk-micromachining technique for high-yield and low-cost volume production of pressure sensors[J]. 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11.2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11,2011(0):410-413. |
| APA | Wang, Jiachou,&Li, XX.(2011).A single-wafer-based single-sided bulk-micromachining technique for high-yield and low-cost volume production of pressure sensors.2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11.2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11(0),410-413. |
| MLA | Wang, Jiachou,et al."A single-wafer-based single-sided bulk-micromachining technique for high-yield and low-cost volume production of pressure sensors".2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11.2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 .0(2011):410-413. |
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