Functionalized mesoporous thin-film directly self-assembled on resonant-cantilevers for batch-producible chemical sensors
文献类型：期刊论文
| 作者 | Yu, H.T. ; Xu, P.C. ; Xu, T.G. ; Li, XX |
| 刊名 | Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS).2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011
 |
| 出版日期 | 2011 |
| 期号 | 0页码:873-876 |
| ISSN号 | 10846999 |
| 通讯作者 | Yu, H. T. |
| 公开日期 | 2012-08-23 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/109228]  |
| 专题 | 上海微系统与信息技术研究所_微系统技术_期刊论文 |
| 推荐引用方式 GB/T 7714 | Yu, H.T.,Xu, P.C.,Xu, T.G.,et al. Functionalized mesoporous thin-film directly self-assembled on resonant-cantilevers for batch-producible chemical sensors[J]. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS).2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011,2011(0):873-876. |
| APA | Yu, H.T.,Xu, P.C.,Xu, T.G.,&Li, XX.(2011).Functionalized mesoporous thin-film directly self-assembled on resonant-cantilevers for batch-producible chemical sensors.Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS).2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011(0),873-876. |
| MLA | Yu, H.T.,et al."Functionalized mesoporous thin-film directly self-assembled on resonant-cantilevers for batch-producible chemical sensors".Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS).2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011 .0(2011):873-876. |
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