A thermal tunable bulk-micromachined optical filter
文献类型：期刊论文
| 作者 | Li, Sihua ; Zhong,SL ; Xu, Jing ; Wu,YM |
| 刊名 | 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11.2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
 |
| 出版日期 | 2011 |
| 页码 | 550-553 |
| 通讯作者 | Li, S.(lisihua@mail.sim.ac.cn) |
| 收录类别 | EI-133 |
| 语种 | 英语 |
| 公开日期 | 2012-08-23 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/109250]  |
| 专题 | 上海微系统与信息技术研究所_微系统技术_期刊论文 |
| 推荐引用方式 GB/T 7714 | Li, Sihua,Zhong,SL,Xu, Jing,et al. A thermal tunable bulk-micromachined optical filter[J]. 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11.2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11,2011:550-553. |
| APA | Li, Sihua,Zhong,SL,Xu, Jing,&Wu,YM.(2011).A thermal tunable bulk-micromachined optical filter.2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11.2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11,550-553. |
| MLA | Li, Sihua,et al."A thermal tunable bulk-micromachined optical filter".2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11.2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 (2011):550-553. |
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