A monolithically integrated 3-axis thermal-convective accelerometer with a pneumatically curved thermopile-cantilever for Z-axis sensing
文献类型：期刊论文
| 作者 | Wang, Quan ; Li, Xinxin |
| 刊名 | 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11.2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
 |
| 出版日期 | 2011 |
| 页码 | 2018-2021 |
| 通讯作者 | Wang, Q. |
| 收录类别 | EI-280 |
| 语种 | 英语 |
| 公开日期 | 2012-08-23 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/109255]  |
| 专题 | 上海微系统与信息技术研究所_微系统技术_期刊论文 |
| 推荐引用方式 GB/T 7714 | Wang, Quan,Li, Xinxin. A monolithically integrated 3-axis thermal-convective accelerometer with a pneumatically curved thermopile-cantilever for Z-axis sensing[J]. 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11.2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11,2011:2018-2021. |
| APA | Wang, Quan,&Li, Xinxin.(2011).A monolithically integrated 3-axis thermal-convective accelerometer with a pneumatically curved thermopile-cantilever for Z-axis sensing.2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11.2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11,2018-2021. |
| MLA | Wang, Quan,et al."A monolithically integrated 3-axis thermal-convective accelerometer with a pneumatically curved thermopile-cantilever for Z-axis sensing".2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11.2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 (2011):2018-2021. |
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