A TIA-based readout circuit with temperature compensation for MEMS capacitive gyroscope
文献类型：期刊论文
| 作者 | Yin, Tao ; Wu, Huanming ; Wu, Qisong ; Yang, Haigang ; Jiao, JW |
| 刊名 | NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems.NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems
 |
| 出版日期 | 2011 |
| 期号 | 0页码:401-405 |
| 通讯作者 | Yin, T. |
| 公开日期 | 2012-08-23 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/109257]  |
| 专题 | 上海微系统与信息技术研究所_微系统技术_期刊论文 |
| 推荐引用方式 GB/T 7714 | Yin, Tao,Wu, Huanming,Wu, Qisong,et al. A TIA-based readout circuit with temperature compensation for MEMS capacitive gyroscope[J]. NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems.NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems,2011(0):401-405. |
| APA | Yin, Tao,Wu, Huanming,Wu, Qisong,Yang, Haigang,&Jiao, JW.(2011).A TIA-based readout circuit with temperature compensation for MEMS capacitive gyroscope.NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems.NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems(0),401-405. |
| MLA | Yin, Tao,et al."A TIA-based readout circuit with temperature compensation for MEMS capacitive gyroscope".NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems.NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems .0(2011):401-405. |
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