Axially stretched nano-thick piezoresistive silicon clamped-beams to sense specific-reaction-induced double-side surface-stress with much higher sensitivity than cantilevers
文献类型：期刊论文
| 作者 | Chen, Ying ; Xu, Pengcheng ; Li, XX |
| 刊名 | 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11.2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
 |
| 出版日期 | 2011 |
| 期号 | 0页码:2574-2577 |
| 通讯作者 | Li, X.(xxli@mail.sim.ac.cn) |
| 公开日期 | 2012-08-23 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/109260]  |
| 专题 | 上海微系统与信息技术研究所_微系统技术_期刊论文 |
| 推荐引用方式 GB/T 7714 | Chen, Ying,Xu, Pengcheng,Li, XX. Axially stretched nano-thick piezoresistive silicon clamped-beams to sense specific-reaction-induced double-side surface-stress with much higher sensitivity than cantilevers[J]. 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11.2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11,2011(0):2574-2577. |
| APA | Chen, Ying,Xu, Pengcheng,&Li, XX.(2011).Axially stretched nano-thick piezoresistive silicon clamped-beams to sense specific-reaction-induced double-side surface-stress with much higher sensitivity than cantilevers.2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11.2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11(0),2574-2577. |
| MLA | Chen, Ying,et al."Axially stretched nano-thick piezoresistive silicon clamped-beams to sense specific-reaction-induced double-side surface-stress with much higher sensitivity than cantilevers".2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11.2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 .0(2011):2574-2577. |
入库方式： OAI收割
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。