中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Axially stretched nano-thick piezoresistive silicon clamped-beams to sense specific-reaction-induced double-side surface-stress with much higher sensitivity than cantilevers

文献类型:期刊论文

作者Chen, Ying ; Xu, Pengcheng ; Li, XX
刊名2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11.2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
出版日期2011
期号0页码:2574-2577
通讯作者Li, X.(xxli@mail.sim.ac.cn)
公开日期2012-08-23
源URL[http://ir.sim.ac.cn/handle/331004/109260]  
专题上海微系统与信息技术研究所_微系统技术_期刊论文
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GB/T 7714
Chen, Ying,Xu, Pengcheng,Li, XX. Axially stretched nano-thick piezoresistive silicon clamped-beams to sense specific-reaction-induced double-side surface-stress with much higher sensitivity than cantilevers[J]. 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11.2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11,2011(0):2574-2577.
APA Chen, Ying,Xu, Pengcheng,&Li, XX.(2011).Axially stretched nano-thick piezoresistive silicon clamped-beams to sense specific-reaction-induced double-side surface-stress with much higher sensitivity than cantilevers.2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11.2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11(0),2574-2577.
MLA Chen, Ying,et al."Axially stretched nano-thick piezoresistive silicon clamped-beams to sense specific-reaction-induced double-side surface-stress with much higher sensitivity than cantilevers".2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11.2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 .0(2011):2574-2577.

入库方式: OAI收割

来源:上海微系统与信息技术研究所

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