Design, Modeling, and Micromanipulation Experiments of A Novel 2-D Micro Force Sensor
文献类型：会议论文
| 作者 | Liu YY(刘意杨) ; Wang YC(王越超); Yu P(于鹏); Dong ZL(董再励)
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| 出版日期 | 2009 |
| 会议名称 | International Conference on Nanoscience and Technology |
| 会议日期 | September 1-3, 2009 in Beijing. ChinaNANO2009 |
| 会议地点 | Beijing, China |
| 关键词 | Micromanipulation 2-D Micro Force Sensor |
| 页码 | 287-291 |
| 中文摘要 | Because of the micro/nano manipulation’s complexity, the accurate feedback information of the micro interactive force acting on micro devices is quite important and necessary for micro/nano manipulation, especially the 2-D micro interactive force feedback information. At present, there are no reliable and accurate 2-D micro force sensors applied in micro/nano manipulation. To solve the above problem, a novel 2-D micro force sensor that can reliably measure force in the range of sub-micro-Newton (μN) is designed and developed in this paper. Based on the model of 1-D micro force sensor designed by us, the model of this 2-D sensor is set up. To verify the model of the 2-D sensor, micromanipulation experiments are designed and realized. Experiment results show the sub-micro-Newton resolution, and verify the validity of the 2-D sensor’s model. The developed 2-D micro force sensor will contribute to promote the complexity of micro/nano manipulation, and will facilitate to realize automating the micro/nano manipulation. |
| 产权排序 | 1 |
| 会议录 | International Conference on Nanoscience and Technology
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| 语种 | 英语 |
| 源URL | [http://ir.sia.cn/handle/173321/9835]  |
| 专题 | 沈阳自动化研究所_机器人学研究室 |
| 推荐引用方式 GB/T 7714 | Liu YY,Wang YC,Yu P,et al. Design, Modeling, and Micromanipulation Experiments of A Novel 2-D Micro Force Sensor[C]. 见:International Conference on Nanoscience and Technology. Beijing, China. September 1-3, 2009 in Beijing. ChinaNANO2009. |
入库方式： OAI收割
来源：沈阳自动化研究所
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