Infinite Dimension Modeling of A Novel Micro Force Sensor and The Application in Micromanipulation
文献类型：会议论文
| 作者 | Liu YY(刘意杨) ; Wang YC(王越超); Yu P(于鹏); Dong ZL(董再励)
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| 出版日期 | 2009 |
| 会议名称 | International Conference on Nanoscience and Technology, ChinaNano2009 |
| 会议日期 | September 1-3, 2009 |
| 会议地点 | Beijing, China |
| 关键词 | Micromanipulation Micro force Sensor Infinite dimension |
| 页码 | 273-278 |
| 中文摘要 | To accurately measure the micro interactive force (For example, adhesion, surface tension, friction, and assembly force) acting on micro devices during micro/nano manipulation, a novel micro force sensor that can reliably measure force in the range of sub-micro-Newton (μN) is designed and developed in this paper. During the application of this micro force sensor in micro/nano manipulation, the accuracy of this sensor’s model is quite important to the force control of the system. Therefore, the accurate infinite dimension model of the micro force sensor is modeling. Based on the infinite dimension model, the micro force control algorithm is designed. To verify the infinite dimension model and the control algorithm, a micromanipulation experiment is designed and realized. Experiment results verify the accuracy of the infinite dimension model of the sensor, and show the efficiency of the force control algorithm. The developed micro force sensor and the infinite dimension modeling provide a feasible and versatile solution in micro force sensing and feedback force control for micro/nano manipulation, and will promote the technology of automating the micro/nano manipulation. |
| 产权排序 | 1 |
| 会议录 | International Conference on Nanoscience and Technology
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| 语种 | 英语 |
| 源URL | [http://ir.sia.cn/handle/173321/9839]  |
| 专题 | 沈阳自动化研究所_机器人学研究室 |
| 推荐引用方式 GB/T 7714 | Liu YY,Wang YC,Yu P,et al. Infinite Dimension Modeling of A Novel Micro Force Sensor and The Application in Micromanipulation[C]. 见:International Conference on Nanoscience and Technology, ChinaNano2009. Beijing, China. September 1-3, 2009. |
入库方式： OAI收割
来源：沈阳自动化研究所
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