The design and micromachining of an electromagnetic MEMS flapping-wing micro air vehicle
文献类型：期刊论文
| 作者 | Meng, Kun; Zhang, Weiping; Chen, Wenyuan ; Li HY(李洪谊); Chi, Pengcheng; Zou, Caijun; Wu, Xiaosheng; Cui, Feng; Liu, Wu; Chen, Jinge
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| 刊名 | MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
 |
| 出版日期 | 2012 |
| 卷号 | 18期号:1页码:127-136 |
| ISSN号 | 0946-7076 |
| 通讯作者 | Zhang, Weiping |
| 产权排序 | 2 |
| 中文摘要 | An electromagnetic MEMS flapping-wing micro air vehicle at insect scale is presented. The detailed scheme, design, micro fabrication and experiment are given in this paper. Firstly, by commercial software ANSYS and MATLAB, electromagnetic analysis, modal analysis and kinetics analysis are proposed. Moreover, based on the result of theoretical analysis, appropriate structure, material and inherent frequency are selected. Then, a new LIGA-like process based on SU-8 photoresist technology is adopted to fabricate thorax, tergum and vein. Finally, a 3.5 cm wingspan, 144 mg weight prototype is integrated, and then we finish the flapping test for this prototype, which has a flapping resonance frequency range of 120-150 Hz. The test result demonstrates the feasibility solution in the development of FMAV based on MEMS, this work is a stepping-stone on the path toward flying robotic insects. |
| WOS标题词 | Science & Technology ; Technology ; Physical Sciences |
| 类目[WOS] | Engineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary ; Physics, Applied |
| 研究领域[WOS] | Engineering ; Science & Technology - Other Topics ; Materials Science ; Physics |
| 关键词[WOS] | MEMBRANE ; INSECT |
| 资助信息 | This work are supported by the Open Foundation of State Key Laboratory of Robotics (R20200904), the support foundation of the Ministry of Education (62501040303) and the High Technology Research and Development Program of China_863 Program (2009AA04Z203), the Program for New Century Excellent Talents in University from Ministry of Education of China (NCET 10-0583). |
| 收录类别 | SCI ; EI |
| 语种 | 英语 |
| WOS记录号 | WOS:000301638400014 |
| 公开日期 | 2012-10-24 |
| 源URL | [http://ir.sia.cn/handle/173321/10039]  |
| 专题 | 沈阳自动化研究所_机器人学研究室 |
| 推荐引用方式 GB/T 7714 | Meng, Kun,Zhang, Weiping,Chen, Wenyuan,et al. The design and micromachining of an electromagnetic MEMS flapping-wing micro air vehicle[J]. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS,2012,18(1):127-136. |
| APA | Meng, Kun.,Zhang, Weiping.,Chen, Wenyuan.,Li HY.,Chi, Pengcheng.,...&Chen, Jinge.(2012).The design and micromachining of an electromagnetic MEMS flapping-wing micro air vehicle.MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS,18(1),127-136. |
| MLA | Meng, Kun,et al."The design and micromachining of an electromagnetic MEMS flapping-wing micro air vehicle".MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS 18.1(2012):127-136. |
入库方式： OAI收割
来源：沈阳自动化研究所
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