Research and implementation of the interface a data collection management
文献类型：会议论文
| 作者 | Ye JF(叶家发); Liu MZ(刘明哲) ; Wang YN(王亚楠)
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| 出版日期 | 2012 |
| 会议名称 | 2012 2nd International Conference on Consumer Electronics, Communications and Networks, CECNet 2012 |
| 会议日期 | April 21-23, 2012 |
| 会议地点 | Yichang, China |
| 关键词 | semiconductor equipment factory automation Interface A data collection |
| 页码 | 1996-1999 |
| 中文摘要 | According to the requirement of equipment data acquisition of semiconductor manufacturing equipment in the factory automation, this paper presents a new method to acquire the equipment data, which is based on the SEMI Interface A for data collection management. The method defines how to collect the information which we need through the use of a named data collection plan. The testing results show that the method meets the requirement of equipment data acquisition in the factory automation. |
| 收录类别 | EI |
| 产权排序 | 1 |
| 会议录 | 2012 2nd International Conference on Consumer Electronics, Communications and Networks (CECNet)
 |
| 会议录出版者 | IEEE |
| 会议录出版地 | New York, USA |
| 语种 | 英语 |
| ISBN号 | 978-1-4577-1415-3 |
| 源URL | [http://ir.sia.cn/handle/173321/10243]  |
| 专题 | 沈阳自动化研究所_工业控制网络与系统研究室 |
| 推荐引用方式 GB/T 7714 | Ye JF,Liu MZ,Wang YN. Research and implementation of the interface a data collection management[C]. 见:2012 2nd International Conference on Consumer Electronics, Communications and Networks, CECNet 2012. Yichang, China. April 21-23, 2012. |
入库方式： OAI收割
来源：沈阳自动化研究所
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