Investigation on electrode size of high frequency ultrasonic transducers
文献类型：会议论文
| 作者 | Wei YJ(魏阳杰); Thomas Herzog; Henning Heuer |
| 出版日期 | 2012 |
| 会议名称 | 3rd International Conference on Sensor Device Technologies and Applications (SENSORDEVICES 2012) |
| 会议日期 | August 19-24, 2012 |
| 会议地点 | Rome, Italy |
| 关键词 | Electrode size electric impedance matching ultrasonic transducer |
| 页码 | 137-142 |
| 中文摘要 | This paper presents a concept to increase the performance of high frequency ultrasonic transducers. For a sandwich high frequency ultrasonic transducer, the top electrode should be smaller than the piezoelectric plate to avoid shortcuts and edge effects. However, its size can influence properties of the transducer, and until now there is no research about it published. A theoretical investigation about influence of the top electrode size on properties of a transducer is conducted in this paper. First, two factors related with the top electrode size based on transmission coefficient and stored energy are proposed; Then, analysis on an Al-AlNAl on silicon wafers with different electrode sizes are performed and the results prove the effectiveness and the validity of the proposed factors. Finally, electrical impedance matching experiments are conducted to improve the properties of transducers with different electrode sizes, and the experiment results show that the improved resolution and sensitivity after matching. |
| 产权排序 | 1 |
| 会议主办者 | The International Academy, Research and Industry Association (IARIA) |
| 会议录 | 3rd International Conference on Sensor Device Technologies and Applications (SENSORDEVICES 2012)
 |
| 会议录出版者 | IARIA |
| 语种 | 英语 |
| ISBN号 | 978-1-61208-208-0 |
| 源URL | [http://ir.sia.cn/handle/173321/10204]  |
| 专题 | 沈阳自动化研究所_机器人学研究室 |
| 推荐引用方式 GB/T 7714 | Wei YJ,Thomas Herzog,Henning Heuer. Investigation on electrode size of high frequency ultrasonic transducers[C]. 见:3rd International Conference on Sensor Device Technologies and Applications (SENSORDEVICES 2012). Rome, Italy. August 19-24, 2012. |
入库方式： OAI收割
来源：沈阳自动化研究所
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