中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Double-swing method used for polishing off-axis aspherical mirrors (EI CONFERENCE)

文献类型:会议论文

AuthorWang P. ; Li J.-F. ; Xuan B. ; Chen X.-P. ; Song S.-M. ; Chen Y. ; Xie J.-J.
Issued Date2009
Conference Name4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, November 19, 2008 - November 21, 2008
Conference PlaceChengdu, China
KeywordBased on the characteristics of off-axis aspherical surface the comparison of simulation effects under different parameters is made. In order to achieve optimal parameters a new method used for polishing off-axis aspherical mirrors-Double-Swing Method (DSM) is proposed in this paper a high order off-axis rectangle aspherical mirror has been polished by DSM. The final result of profile measurements of 12nm and the polishing mechanism of DSM is introduced. The mathematical model of the DSM with steady movement state is established.The movement of this mathematical model is simulated in a programming language RMS is achieved. The result indicates that the method is of practice and has even higher working efficiency and precision. 2009 SPIE.
Indexed TypeEI
源URL[http://ir.ciomp.ac.cn/handle/181722/33842]  
Collection长春光学精密机械与物理研究所_中科院长春光机所知识产出_会议论文
Recommended Citation
GB/T 7714
Wang P.,Li J.-F.,Xuan B.,et al. Double-swing method used for polishing off-axis aspherical mirrors (EI CONFERENCE)[C]. 见:4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, November 19, 2008 - November 21, 2008. Chengdu, China.

入库方式: 人工提交

来源:长春光学精密机械与物理研究所

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