Design, Fabrication, and Characterization of a High-Heating-Efficiency 3-D Microheater for Catalytic Gas Sensors
文献类型：期刊论文
| 作者 | Xu, L ; Wang, YC ; Zhou, H ; Liu, YX ; Li, T ; Wang, YL |
| 刊名 | JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
 |
| 出版日期 | 2012 |
| 卷号 | 21期号:6页码:1402-1409 |
| 关键词 | Anisotropic etching catalytic gas sensors concave-shaped membrane power per active area (PPAA) sol-gel 3-D microheaters |
| ISSN号 | 1057-7157 |
| 通讯作者 | Xu, L (reprint author), Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Transducer Technol, Shanghai 200050, Peoples R China. |
| 中文摘要 | In this paper, a novel 3-D microheater has been developed in order to improve the performance of catalytic gas sensors. The 3-D microheater consists of a platinum heater embedded in a concave-shaped membrane which was formed in twice wet-chemical anisotro |
| 学科主题 | Engineering |
| 收录类别 | 2012SCI-002 |
| 原文出处 | 10.1109/JMEMS.2012.2208219 |
| 语种 | 英语 |
| 公开日期 | 2013-04-23 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/114886]  |
| 专题 | 上海微系统与信息技术研究所_微系统技术_期刊论文 |
| 推荐引用方式 GB/T 7714 | Xu, L,Wang, YC,Zhou, H,et al. Design, Fabrication, and Characterization of a High-Heating-Efficiency 3-D Microheater for Catalytic Gas Sensors[J]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS,2012,21(6):1402-1409. |
| APA | Xu, L,Wang, YC,Zhou, H,Liu, YX,Li, T,&Wang, YL.(2012).Design, Fabrication, and Characterization of a High-Heating-Efficiency 3-D Microheater for Catalytic Gas Sensors.JOURNAL OF MICROELECTROMECHANICAL SYSTEMS,21(6),1402-1409. |
| MLA | Xu, L,et al."Design, Fabrication, and Characterization of a High-Heating-Efficiency 3-D Microheater for Catalytic Gas Sensors".JOURNAL OF MICROELECTROMECHANICAL SYSTEMS 21.6(2012):1402-1409. |
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