Micro-/Nanocombined Gas Sensors With Functionalized Mesoporous Thin Film Self-Assembled in Batches Onto Resonant Cantilevers
文献类型：期刊论文
| 作者 | Yu, HT ; Xu, PC ; Xia, XY ; Lee, DW ; Li, XX |
| 刊名 | IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS
 |
| 出版日期 | 2012 |
| 卷号 | 59期号:12页码:4881-4887 |
| 关键词 | Chemical sensor in-wall modification mesoporous thin film (MTF) microelectromechanical systems (MEMS) resonant cantilever |
| ISSN号 | 0278-0046 |
| 通讯作者 | Yu, HT (reprint author), Chinese Acad Sci, State Key Lab Transducer Technol, Shanghai Inst Microsyst & Informat Technol, Shanghai 200050, Peoples R China. |
| 中文摘要 | This paper reports a novel top-down/bottom-up combined resonant microcantilever chemical sensor, where the nanosensing material of a functionalized mesoporous thin film (MTF) is directly self-assembled on the sensing region of the integrated microcantilev |
| 学科主题 | Automation & Control Systems; Engineering; Instruments & Instrumentation |
| 收录类别 | 2012SCI-011 |
| 原文出处 | 10.1109/TIE.2011.2173094 |
| 语种 | 英语 |
| 公开日期 | 2013-04-23 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/114890]  |
| 专题 | 上海微系统与信息技术研究所_微系统技术_期刊论文 |
| 推荐引用方式 GB/T 7714 | Yu, HT,Xu, PC,Xia, XY,et al. Micro-/Nanocombined Gas Sensors With Functionalized Mesoporous Thin Film Self-Assembled in Batches Onto Resonant Cantilevers[J]. IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS,2012,59(12):4881-4887. |
| APA | Yu, HT,Xu, PC,Xia, XY,Lee, DW,&Li, XX.(2012).Micro-/Nanocombined Gas Sensors With Functionalized Mesoporous Thin Film Self-Assembled in Batches Onto Resonant Cantilevers.IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS,59(12),4881-4887. |
| MLA | Yu, HT,et al."Micro-/Nanocombined Gas Sensors With Functionalized Mesoporous Thin Film Self-Assembled in Batches Onto Resonant Cantilevers".IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS 59.12(2012):4881-4887. |
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