Wheatstone bridge piezoresistive sensing for bulk-mode micromechanical resonator
文献类型：期刊论文
| 作者 | Wu, GQ ; Xu, DH ; Xiong, B ; Wang, YL |
| 刊名 | APPLIED PHYSICS LETTERS
 |
| 出版日期 | 2012 |
| 卷号 | 101期号:19页码:193505 |
| 关键词 | micromechanical resonators microsensors piezoresistive devices |
| ISSN号 | 0003-6951 |
| 通讯作者 | Wu, GQ (reprint author), Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, Sci & Technol Microsyst Lab, State Key Lab Transducer Technol, 865 Changning Rd, Shanghai 200050, Peoples R China. |
| 中文摘要 | A balanced wheatstone bridge technique for piezoresistive detection in micromechanical resonators is demonstrated. Two identical beam resonators, which vibrate in the length extensional mode with 180 degrees phase shift, are connected in serial to compose |
| 学科主题 | Physics |
| 收录类别 | 2012SCI-015 |
| 原文出处 | 10.1063/1.4766441 |
| 语种 | 英语 |
| 公开日期 | 2013-04-23 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/114891]  |
| 专题 | 上海微系统与信息技术研究所_微系统技术_期刊论文 |
| 推荐引用方式 GB/T 7714 | Wu, GQ,Xu, DH,Xiong, B,et al. Wheatstone bridge piezoresistive sensing for bulk-mode micromechanical resonator[J]. APPLIED PHYSICS LETTERS,2012,101(19):193505. |
| APA | Wu, GQ,Xu, DH,Xiong, B,&Wang, YL.(2012).Wheatstone bridge piezoresistive sensing for bulk-mode micromechanical resonator.APPLIED PHYSICS LETTERS,101(19),193505. |
| MLA | Wu, GQ,et al."Wheatstone bridge piezoresistive sensing for bulk-mode micromechanical resonator".APPLIED PHYSICS LETTERS 101.19(2012):193505. |
入库方式： OAI收割
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。