Batch-fabricated cantilever probes with electrical shielding for nanoscale dielectric and conductivity imaging
文献类型：期刊论文
| 作者 | Yang, YL ; Lai, KJ ; Tang, QC ; Kundhikanjana, W ; Kelly, MA ; Zhang, K ; Shen, ZX ; Li, XX |
| 刊名 | JOURNAL OF MICROMECHANICS AND MICROENGINEERING
 |
| 出版日期 | 2012 |
| 卷号 | 22期号:11页码:115040 |
| ISSN号 | 0960-1317 |
| 通讯作者 | Shen, ZX (reprint author), Stanford Univ, Dept Appl Phys, Stanford, CA 94305 USA. |
| 中文摘要 | This paper presents the design and fabrication of batch-processed cantilever probes with electrical shielding for scanning microwave impedance microscopy. The diameter of the tip apex, which defines the electrical resolution, is less than 50 nm. The width |
| 学科主题 | Engineering; Science & Technology - Other Topics; Instruments & Instrumentation; Materials Science; Mechanics |
| 收录类别 | 2012SCI-021 |
| 原文出处 | 10.1088/0960-1317/22/11/115040 |
| 语种 | 英语 |
| 公开日期 | 2013-04-23 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/114894]  |
| 专题 | 上海微系统与信息技术研究所_微系统技术_期刊论文 |
| 推荐引用方式 GB/T 7714 | Yang, YL,Lai, KJ,Tang, QC,et al. Batch-fabricated cantilever probes with electrical shielding for nanoscale dielectric and conductivity imaging[J]. JOURNAL OF MICROMECHANICS AND MICROENGINEERING,2012,22(11):115040. |
| APA | Yang, YL.,Lai, KJ.,Tang, QC.,Kundhikanjana, W.,Kelly, MA.,...&Li, XX.(2012).Batch-fabricated cantilever probes with electrical shielding for nanoscale dielectric and conductivity imaging.JOURNAL OF MICROMECHANICS AND MICROENGINEERING,22(11),115040. |
| MLA | Yang, YL,et al."Batch-fabricated cantilever probes with electrical shielding for nanoscale dielectric and conductivity imaging".JOURNAL OF MICROMECHANICS AND MICROENGINEERING 22.11(2012):115040. |
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