A novel sandwich capacitive accelerometer with a symmetrical structure fabricated from a D-SOI wafer
文献类型：期刊论文
| 作者 | Zhou, XF ; Che, LF ; Wu, J ; Li, XL ; Wang, YL |
| 刊名 | JOURNAL OF MICROMECHANICS AND MICROENGINEERING
 |
| 出版日期 | 2012 |
| 卷号 | 22期号:8页码:85031 |
| ISSN号 | 0960-1317 |
| 通讯作者 | Che, LF (reprint author), Chinese Acad Sci, Sci & Technol Microsyst Lab, State Key Lab Transducer Technol, Shanghai Inst Microsyst & Informat Technol, 865 Changning Rd, Shanghai 200050, Peoples R China. |
| 中文摘要 | This paper presents a novel sandwich capacitance accelerometer with a symmetrical double-sided beam-mass structure. The symmetrical beam-mass structure is fabricated from a double-device-layer silicon-on-insulate (D-SOI) wafer. The proof mass is suspended |
| 学科主题 | Engineering; Science & Technology - Other Topics; Instruments & Instrumentation; Materials Science; Mechanics |
| 收录类别 | 2012SCI-081 |
| 原文出处 | 10.1088/0960-1317/22/8/085031 |
| 语种 | 英语 |
| 公开日期 | 2013-04-23 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/114908]  |
| 专题 | 上海微系统与信息技术研究所_微系统技术_期刊论文 |
| 推荐引用方式 GB/T 7714 | Zhou, XF,Che, LF,Wu, J,et al. A novel sandwich capacitive accelerometer with a symmetrical structure fabricated from a D-SOI wafer[J]. JOURNAL OF MICROMECHANICS AND MICROENGINEERING,2012,22(8):85031. |
| APA | Zhou, XF,Che, LF,Wu, J,Li, XL,&Wang, YL.(2012).A novel sandwich capacitive accelerometer with a symmetrical structure fabricated from a D-SOI wafer.JOURNAL OF MICROMECHANICS AND MICROENGINEERING,22(8),85031. |
| MLA | Zhou, XF,et al."A novel sandwich capacitive accelerometer with a symmetrical structure fabricated from a D-SOI wafer".JOURNAL OF MICROMECHANICS AND MICROENGINEERING 22.8(2012):85031. |
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