A novel capacitive accelerometer with a highly symmetrical double-sided beam-mass structure
文献类型：期刊论文
| 作者 | Zhou, XF ; Che, LF ; Xiong, B ; Li, XL ; Wu, J ; Wang, YL |
| 刊名 | SENSORS AND ACTUATORS A-PHYSICAL
 |
| 出版日期 | 2012 |
| 卷号 | 179页码:291-296 |
| 关键词 | Micro-fabrication Accelerometer Symmetrical structure |
| ISSN号 | 0924-4247 |
| 通讯作者 | Che, LF (reprint author), Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, Natl Key Lab Sci & Technol Microsyst, 865 Changning Rd, Shanghai 200050, Peoples R China. |
| 中文摘要 | This paper reports a novel capacitive accelerometer with highly symmetrical double-sided beam-mass structure. The highly symmetrical structure is fabricated from single wafer by a novel vertical sidewall protection technique. The good device performance i |
| 学科主题 | Engineering; Instruments & Instrumentation |
| 收录类别 | 2012SCI-113 |
| 原文出处 | 10.1016/j.sna.2012.03.038 |
| 语种 | 英语 |
| 公开日期 | 2013-04-23 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/114915]  |
| 专题 | 上海微系统与信息技术研究所_微系统技术_期刊论文 |
| 推荐引用方式 GB/T 7714 | Zhou, XF,Che, LF,Xiong, B,et al. A novel capacitive accelerometer with a highly symmetrical double-sided beam-mass structure[J]. SENSORS AND ACTUATORS A-PHYSICAL,2012,179:291-296. |
| APA | Zhou, XF,Che, LF,Xiong, B,Li, XL,Wu, J,&Wang, YL.(2012).A novel capacitive accelerometer with a highly symmetrical double-sided beam-mass structure.SENSORS AND ACTUATORS A-PHYSICAL,179,291-296. |
| MLA | Zhou, XF,et al."A novel capacitive accelerometer with a highly symmetrical double-sided beam-mass structure".SENSORS AND ACTUATORS A-PHYSICAL 179(2012):291-296. |
入库方式： OAI收割
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。