Uncooled Thermoelectric Infrared Sensor With Advanced Micromachining
文献类型：期刊论文
| 作者 | Xu, DH ; Xiong, B ; Wu, GQ ; Ma, YL ; Wang, YL |
| 刊名 | IEEE SENSORS JOURNAL
 |
| 出版日期 | 2012 |
| 卷号 | 12期号:6页码:- |
| 关键词 | Advanced micromachining microelectromechanical systems (MEMS) thermoelectric uncooled infrared sensor wet silicon etching XeF2 silicon etching |
| ISSN号 | 1530-437X |
| 通讯作者 | Xu, DH (reprint author), Chinese Acad Sci, Sci & Technol Microsyst Lab, State Key Lab Transducer Technol, Shanghai Inst Microsyst & Informat Technol, Shanghai 200050, Peoples R China. |
| 中文摘要 | A simple mass producible uncooled thermoelectric infrared microsensor has been designed and fabricated. To improve the cost-efficiency, an advanced micromachining process, which combines wet anisotropic pre-etching and XeF2 dry isotropic post-etching, is |
| 学科主题 | Engineering; Instruments & Instrumentation; Physics |
| 收录类别 | 2012SCI-114 |
| 原文出处 | 10.1109/JSEN.2011.2181497 |
| 语种 | 英语 |
| 公开日期 | 2013-04-23 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/114916]  |
| 专题 | 上海微系统与信息技术研究所_微系统技术_期刊论文 |
| 推荐引用方式 GB/T 7714 | Xu, DH,Xiong, B,Wu, GQ,et al. Uncooled Thermoelectric Infrared Sensor With Advanced Micromachining[J]. IEEE SENSORS JOURNAL,2012,12(6):-. |
| APA | Xu, DH,Xiong, B,Wu, GQ,Ma, YL,&Wang, YL.(2012).Uncooled Thermoelectric Infrared Sensor With Advanced Micromachining.IEEE SENSORS JOURNAL,12(6),-. |
| MLA | Xu, DH,et al."Uncooled Thermoelectric Infrared Sensor With Advanced Micromachining".IEEE SENSORS JOURNAL 12.6(2012):-. |
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