Monolithic Integration of Pressure Plus Acceleration Composite TPMS Sensors With a Single-Sided Micromachining Technology
文献类型：期刊论文
| 作者 | Wang, JC ; Xia, XY ; Li, XX |
| 刊名 | JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
 |
| 出版日期 | 2012 |
| 卷号 | 21期号:2页码:284-293 |
| 关键词 | Accelerometer front-side monolithic micromachining piezoresistance pressure sensor sensor |
| ISSN号 | 1057-7157 |
| 通讯作者 | Wang, JC (reprint author), Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Transducer Technol & Sci, Shanghai 200050, Peoples R China. |
| 中文摘要 | This paper concerns the development of a single-side micromachined tire-pressure monitoring system (TPMS) sensor for automobiles, which is with a piezoresistive pressure sensor and a cantilever-mass piezoresistive accelerometer monolithically integrated i |
| 学科主题 | Engineering |
| 收录类别 | 2012SCI-152 |
| 原文出处 | 10.1109/JMEMS.2011.2178117 |
| 语种 | 英语 |
| 公开日期 | 2013-04-23 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/114921]  |
| 专题 | 上海微系统与信息技术研究所_微系统技术_期刊论文 |
| 推荐引用方式 GB/T 7714 | Wang, JC,Xia, XY,Li, XX. Monolithic Integration of Pressure Plus Acceleration Composite TPMS Sensors With a Single-Sided Micromachining Technology[J]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS,2012,21(2):284-293. |
| APA | Wang, JC,Xia, XY,&Li, XX.(2012).Monolithic Integration of Pressure Plus Acceleration Composite TPMS Sensors With a Single-Sided Micromachining Technology.JOURNAL OF MICROELECTROMECHANICAL SYSTEMS,21(2),284-293. |
| MLA | Wang, JC,et al."Monolithic Integration of Pressure Plus Acceleration Composite TPMS Sensors With a Single-Sided Micromachining Technology".JOURNAL OF MICROELECTROMECHANICAL SYSTEMS 21.2(2012):284-293. |
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