TPMS (tire-pressure monitoring system) sensors: Monolithic integration of surface-micromachined piezoresistive pressure sensor and self-testable accelerometer
文献类型：期刊论文
| 作者 | Wei, CZ ; Zhou, W ; Wang, Q ; Xia, XY ; Li, XX |
| 刊名 | MICROELECTRONIC ENGINEERING
 |
| 出版日期 | 2012 |
| 卷号 | 91页码:167-173 |
| 关键词 | Automotive sensor Pressure sensor Accelerometer Piezoresistance Surface-micromachining Self-testing |
| ISSN号 | 0167-9317 |
| 通讯作者 | Li, XX (reprint author), Chinese Acad Sci, State Key Lab Transducer Technol & Sci & Technol, Shanghai Inst Microsyst & Informat Technol, Shanghai 200050, Peoples R China. |
| 中文摘要 | A novel surface-micromachining technology is developed to monolithically integrate piezoresistive pressure sensor and accelerometer for tire-pressure monitor system (TPMS) applications. A narrow rectangular diaphragm piezoresistive pressure sensor and a c |
| 学科主题 | Engineering; Science & Technology - Other Topics; Optics; Physics |
| 收录类别 | 2012SCI-182 |
| 原文出处 | 10.1016/j.mee.2011.10.001 |
| 语种 | 英语 |
| 公开日期 | 2013-04-23 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/114926]  |
| 专题 | 上海微系统与信息技术研究所_微系统技术_期刊论文 |
| 推荐引用方式 GB/T 7714 | Wei, CZ,Zhou, W,Wang, Q,et al. TPMS (tire-pressure monitoring system) sensors: Monolithic integration of surface-micromachined piezoresistive pressure sensor and self-testable accelerometer[J]. MICROELECTRONIC ENGINEERING,2012,91:167-173. |
| APA | Wei, CZ,Zhou, W,Wang, Q,Xia, XY,&Li, XX.(2012).TPMS (tire-pressure monitoring system) sensors: Monolithic integration of surface-micromachined piezoresistive pressure sensor and self-testable accelerometer.MICROELECTRONIC ENGINEERING,91,167-173. |
| MLA | Wei, CZ,et al."TPMS (tire-pressure monitoring system) sensors: Monolithic integration of surface-micromachined piezoresistive pressure sensor and self-testable accelerometer".MICROELECTRONIC ENGINEERING 91(2012):167-173. |
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