中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
TPMS (tire-pressure monitoring system) sensors: Monolithic integration of surface-micromachined piezoresistive pressure sensor and self-testable accelerometer

文献类型:期刊论文

作者Wei, CZ ; Zhou, W ; Wang, Q ; Xia, XY ; Li, XX
刊名MICROELECTRONIC ENGINEERING
出版日期2012
卷号91页码:167-173
关键词Automotive sensor Pressure sensor Accelerometer Piezoresistance Surface-micromachining Self-testing
ISSN号0167-9317
通讯作者Li, XX (reprint author), Chinese Acad Sci, State Key Lab Transducer Technol & Sci & Technol, Shanghai Inst Microsyst & Informat Technol, Shanghai 200050, Peoples R China.
中文摘要A novel surface-micromachining technology is developed to monolithically integrate piezoresistive pressure sensor and accelerometer for tire-pressure monitor system (TPMS) applications. A narrow rectangular diaphragm piezoresistive pressure sensor and a c
学科主题Engineering; Science & Technology - Other Topics; Optics; Physics
收录类别2012SCI-182
原文出处10.1016/j.mee.2011.10.001
语种英语
公开日期2013-04-23
源URL[http://ir.sim.ac.cn/handle/331004/114926]  
专题上海微系统与信息技术研究所_微系统技术_期刊论文
推荐引用方式
GB/T 7714
Wei, CZ,Zhou, W,Wang, Q,et al. TPMS (tire-pressure monitoring system) sensors: Monolithic integration of surface-micromachined piezoresistive pressure sensor and self-testable accelerometer[J]. MICROELECTRONIC ENGINEERING,2012,91:167-173.
APA Wei, CZ,Zhou, W,Wang, Q,Xia, XY,&Li, XX.(2012).TPMS (tire-pressure monitoring system) sensors: Monolithic integration of surface-micromachined piezoresistive pressure sensor and self-testable accelerometer.MICROELECTRONIC ENGINEERING,91,167-173.
MLA Wei, CZ,et al."TPMS (tire-pressure monitoring system) sensors: Monolithic integration of surface-micromachined piezoresistive pressure sensor and self-testable accelerometer".MICROELECTRONIC ENGINEERING 91(2012):167-173.

入库方式: OAI收割

来源:上海微系统与信息技术研究所

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