TPMS (tire-pressure monitoring system) sensors: Monolithic integration of surface-micromachined piezoresistive pressure sensor and self-testable accelerometer
文献类型:期刊论文
作者 | Wei, CZ ; Zhou, W ; Wang, Q ; Xia, XY ; Li, XX |
刊名 | MICROELECTRONIC ENGINEERING
![]() |
出版日期 | 2012 |
卷号 | 91页码:167-173 |
关键词 | Automotive sensor Pressure sensor Accelerometer Piezoresistance Surface-micromachining Self-testing |
ISSN号 | 0167-9317 |
通讯作者 | Li, XX (reprint author), Chinese Acad Sci, State Key Lab Transducer Technol & Sci & Technol, Shanghai Inst Microsyst & Informat Technol, Shanghai 200050, Peoples R China. |
中文摘要 | A novel surface-micromachining technology is developed to monolithically integrate piezoresistive pressure sensor and accelerometer for tire-pressure monitor system (TPMS) applications. A narrow rectangular diaphragm piezoresistive pressure sensor and a c |
学科主题 | Engineering; Science & Technology - Other Topics; Optics; Physics |
收录类别 | 2012SCI-182 |
原文出处 | 10.1016/j.mee.2011.10.001 |
语种 | 英语 |
公开日期 | 2013-04-23 |
源URL | [http://ir.sim.ac.cn/handle/331004/114926] ![]() |
专题 | 上海微系统与信息技术研究所_微系统技术_期刊论文 |
推荐引用方式 GB/T 7714 | Wei, CZ,Zhou, W,Wang, Q,et al. TPMS (tire-pressure monitoring system) sensors: Monolithic integration of surface-micromachined piezoresistive pressure sensor and self-testable accelerometer[J]. MICROELECTRONIC ENGINEERING,2012,91:167-173. |
APA | Wei, CZ,Zhou, W,Wang, Q,Xia, XY,&Li, XX.(2012).TPMS (tire-pressure monitoring system) sensors: Monolithic integration of surface-micromachined piezoresistive pressure sensor and self-testable accelerometer.MICROELECTRONIC ENGINEERING,91,167-173. |
MLA | Wei, CZ,et al."TPMS (tire-pressure monitoring system) sensors: Monolithic integration of surface-micromachined piezoresistive pressure sensor and self-testable accelerometer".MICROELECTRONIC ENGINEERING 91(2012):167-173. |
入库方式: OAI收割
浏览0
下载0
收藏0
其他版本
除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。