Integrated microcantilevers for high-resolution sensing and probing
文献类型：期刊论文
| 作者 | Li, XX ; Lee, DW |
| 刊名 | MEASUREMENT SCIENCE & TECHNOLOGY
 |
| 出版日期 | 2012 |
| 卷号 | 23期号:2页码:22001 |
| 关键词 | integrated cantilever micro-sensor scanning probe microscopy resonance mode surface-stress nano-tip based instrument |
| ISSN号 | 0957-0233 |
| 通讯作者 | Li, XX (reprint author), Chinese Acad Sci, Shanghai Inst Microsysytem & Informat Technol, State Key Lab Transducer Technol, Shanghai 200050, Peoples R China. |
| 中文摘要 | This topical review is focused on microcantilever-based sensing and probing functions that are realized by integrating a mechanically compliant cantilever with self-sensing and self-actuating elements, specific sensing materials as well as functionalized |
| 学科主题 | Engineering; Instruments & Instrumentation |
| 收录类别 | 2012SCI-205 |
| 原文出处 | 10.1088/0957-0233/23/2/022001 |
| 语种 | 英语 |
| 公开日期 | 2013-04-23 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/114930]  |
| 专题 | 上海微系统与信息技术研究所_微系统技术_期刊论文 |
| 推荐引用方式 GB/T 7714 | Li, XX,Lee, DW. Integrated microcantilevers for high-resolution sensing and probing[J]. MEASUREMENT SCIENCE & TECHNOLOGY,2012,23(2):22001. |
| APA | Li, XX,&Lee, DW.(2012).Integrated microcantilevers for high-resolution sensing and probing.MEASUREMENT SCIENCE & TECHNOLOGY,23(2),22001. |
| MLA | Li, XX,et al."Integrated microcantilevers for high-resolution sensing and probing".MEASUREMENT SCIENCE & TECHNOLOGY 23.2(2012):22001. |
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