A High-Performance Three-Dimensional Microheater-Based Catalytic Gas Sensor
文献类型：期刊论文
| 作者 | Xu, L ; Li, T ; Gao, XL ; Wang, YL |
| 刊名 | IEEE ELECTRON DEVICE LETTERS
 |
| 出版日期 | 2012 |
| 卷号 | 33期号:2页码:284-286 |
| 关键词 | Catalytic gas sensors concave active membrane methane Pd-Pt sol-gel 3-D microheater |
| ISSN号 | 0741-3106 |
| 通讯作者 | Xu, L (reprint author), Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Transducer Technol, Shanghai 200050, Peoples R China. |
| 中文摘要 | We report a high-performance catalytic gas sensor based on a 3-D microheater. Two catalytic gas sensors were fabricated by sol-gel process, respectively based on a 3-D microheater with a concave active membrane and a comparative 2-D microheater with a rec |
| 学科主题 | Engineering |
| 收录类别 | 2012SCI-208 |
| 原文出处 | 10.1109/LED.2011.2177805 |
| 语种 | 英语 |
| 公开日期 | 2013-04-23 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/114933]  |
| 专题 | 上海微系统与信息技术研究所_微系统技术_期刊论文 |
| 推荐引用方式 GB/T 7714 | Xu, L,Li, T,Gao, XL,et al. A High-Performance Three-Dimensional Microheater-Based Catalytic Gas Sensor[J]. IEEE ELECTRON DEVICE LETTERS,2012,33(2):284-286. |
| APA | Xu, L,Li, T,Gao, XL,&Wang, YL.(2012).A High-Performance Three-Dimensional Microheater-Based Catalytic Gas Sensor.IEEE ELECTRON DEVICE LETTERS,33(2),284-286. |
| MLA | Xu, L,et al."A High-Performance Three-Dimensional Microheater-Based Catalytic Gas Sensor".IEEE ELECTRON DEVICE LETTERS 33.2(2012):284-286. |
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