Design, Fabrication and Characterization of a 5x5 Array of Piezoresistive Stress and Temperature Sensors
文献类型：期刊论文
| 作者 | Dou, CG ; Wu, YH ; Yang, H ; Li, XX |
| 刊名 | MICRO-NANO TECHNOLOGY XIII
 |
| 出版日期 | 2012 |
| 卷号 | 503页码:43-48 |
| 关键词 | Stress sensor temperature sensor sensor characterization flexible board |
| ISSN号 | 1013-9826 |
| 通讯作者 | Dou, CG (reprint author), Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, Sci & Technol Microsyst Lab, State Key Lab Transducer Technol, 800 Yishan Rd, Shanghai 200233, Peoples R China. |
| 中文摘要 | This paper reports on the development and characterization of piezoresistive stress and temperature sensors fabricated on silicon-on-insulator (SOI) wafer. The sensor chip consists of a 5x5 array elements enabling the simultaneous measurement of the absol |
| 学科主题 | Science & Technology - Other Topics; Materials Science |
| 收录类别 | 2012SCI-223 |
| 原文出处 | 10.4028/www.scientific.net/KEM.503.43 |
| 语种 | 英语 |
| 公开日期 | 2013-04-23 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/114936]  |
| 专题 | 上海微系统与信息技术研究所_微系统技术_期刊论文 |
| 推荐引用方式 GB/T 7714 | Dou, CG,Wu, YH,Yang, H,et al. Design, Fabrication and Characterization of a 5x5 Array of Piezoresistive Stress and Temperature Sensors[J]. MICRO-NANO TECHNOLOGY XIII,2012,503:43-48. |
| APA | Dou, CG,Wu, YH,Yang, H,&Li, XX.(2012).Design, Fabrication and Characterization of a 5x5 Array of Piezoresistive Stress and Temperature Sensors.MICRO-NANO TECHNOLOGY XIII,503,43-48. |
| MLA | Dou, CG,et al."Design, Fabrication and Characterization of a 5x5 Array of Piezoresistive Stress and Temperature Sensors".MICRO-NANO TECHNOLOGY XIII 503(2012):43-48. |
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