A high Q micromachined single crystal silicon bulk mode resonator with pre-etched cavity
文献类型：期刊论文
| 作者 | Wu, GQ ; Xu, DH ; Xiong, B ; Wang, YL |
| 刊名 | MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
 |
| 出版日期 | 2012 |
| 卷号 | 18期号:1页码:25-30 |
| ISSN号 | 0946-7076 |
| 通讯作者 | Wu, GQ (reprint author), Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Transducer Technol, Sci & Technol Microsyst Lab, 865 Changning Rd, Shanghai 200050, Peoples R China. |
| 中文摘要 | In this paper, a novel method of fabricating micromachined single crystal silicon bulk mode resonators is demonstrated. The most distinguishing feature of this method is that the resonator structure is fabricated and released simultaneously in the end of |
| 学科主题 | Engineering; Science & Technology - Other Topics; Materials Science; Physics |
| 收录类别 | 2012SCI-238 |
| 原文出处 | 10.1007/s00542-011-1372-1 |
| 语种 | 英语 |
| 公开日期 | 2013-04-23 |
| 源URL | [http://ir.sim.ac.cn/handle/331004/114942]  |
| 专题 | 上海微系统与信息技术研究所_微系统技术_期刊论文 |
| 推荐引用方式 GB/T 7714 | Wu, GQ,Xu, DH,Xiong, B,et al. A high Q micromachined single crystal silicon bulk mode resonator with pre-etched cavity[J]. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS,2012,18(1):25-30. |
| APA | Wu, GQ,Xu, DH,Xiong, B,&Wang, YL.(2012).A high Q micromachined single crystal silicon bulk mode resonator with pre-etched cavity.MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS,18(1),25-30. |
| MLA | Wu, GQ,et al."A high Q micromachined single crystal silicon bulk mode resonator with pre-etched cavity".MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS 18.1(2012):25-30. |
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