Optimization of electrode size for aluminum-nitride matrix ultrasonic transducers in the frequency range above 200 MHz
文献类型：期刊论文
| 作者 | Wei YJ(魏阳杰); Herzog, Thomas; Heuer, Henning |
| 刊名 | Ultrasonics
 |
| 出版日期 | 2013 |
| 卷号 | 53期号:3页码:739-744 |
| 关键词 | Aluminum Aluminum nitride Nitrides Optimization Silicon wafers Thin films Ultrasonic transducers |
| ISSN号 | 0041-624X |
| 产权排序 | 1 |
| 通讯作者 | 魏阳杰 |
| 中文摘要 | This paper describes an optimization method of the top electrode size for a thin film matrix ultrasonic transducer (M-UT) in the frequency range above 200 MHz. The goal of this work is to design an optimal top electrode size for an M-UT providing the maximal output peak-peak voltage (V |
| WOS标题词 | Science & Technology ; Technology ; Life Sciences & Biomedicine |
| 类目[WOS] | Acoustics ; Radiology, Nuclear Medicine & Medical Imaging |
| 研究领域[WOS] | Acoustics ; Radiology, Nuclear Medicine & Medical Imaging |
| 关键词[WOS] | FILM |
| 收录类别 | SCI ; EI |
| 语种 | 英语 |
| WOS记录号 | WOS:000314872900015 |
| 公开日期 | 2013-04-21 |
| 源URL | [http://ir.sia.cn/handle/173321/10635]  |
| 专题 | 沈阳自动化研究所_机器人学研究室 |
| 推荐引用方式 GB/T 7714 | Wei YJ,Herzog, Thomas,Heuer, Henning. Optimization of electrode size for aluminum-nitride matrix ultrasonic transducers in the frequency range above 200 MHz[J]. Ultrasonics,2013,53(3):739-744. |
| APA | Wei YJ,Herzog, Thomas,&Heuer, Henning.(2013).Optimization of electrode size for aluminum-nitride matrix ultrasonic transducers in the frequency range above 200 MHz.Ultrasonics,53(3),739-744. |
| MLA | Wei YJ,et al."Optimization of electrode size for aluminum-nitride matrix ultrasonic transducers in the frequency range above 200 MHz".Ultrasonics 53.3(2013):739-744. |
入库方式： OAI收割
来源：沈阳自动化研究所
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