Study on the large-scale assembly and fabrication method for SWCNTs nano device
文献类型：期刊论文
| 作者 | Xu K(许可); Tian XJ(田孝军) ; Wu CD(吴成东); Liu J(刘剑); Li MX(李孟歆); Dong ZL(董再励)
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| 刊名 | SCIENCE CHINA-PHYSICS MECHANICS & ASTRONOMY
 |
| 出版日期 | 2013 |
| 卷号 | 56期号:3页码:556-561 |
| 关键词 | large-scale single-walled carbon nanotube assembly floating potential dielectrophoresis |
| ISSN号 | 1674-7348 |
| 产权排序 | 1 |
| 通讯作者 | 田孝军 |
| 中文摘要 | The large-scale assembly and fabrication method for single-walled carbon nanotube (SWCNT) nano devices was implemented. Assembly of SWCNT field effect transistor (FET) was realized by floating potential dielectrophoresis approach. The simulation of floating potential distribution of the chip was performed by comsol multiphysics coupling software. Six hundred devices were assembled on the area of less than one square centimeter. The fabricated devices were characterized by atomic force microscopy and scanning electron microscopy. The experimental results showed that large-scale assembly had been realized, and the success rate of ideal assembly for SWCNT FET had been assessed. |
| WOS标题词 | Science & Technology ; Physical Sciences |
| 类目[WOS] | Physics, Multidisciplinary |
| 研究领域[WOS] | Physics |
| 关键词[WOS] | CARBON NANOTUBE ; TRANSISTORS |
| 收录类别 | SCI ; EI |
| 语种 | 英语 |
| WOS记录号 | WOS:000314912300013 |
| 公开日期 | 2013-04-21 |
| 源URL | [http://ir.sia.cn/handle/173321/10638]  |
| 专题 | 沈阳自动化研究所_机器人学研究室 |
| 推荐引用方式 GB/T 7714 | Xu K,Tian XJ,Wu CD,et al. Study on the large-scale assembly and fabrication method for SWCNTs nano device[J]. SCIENCE CHINA-PHYSICS MECHANICS & ASTRONOMY,2013,56(3):556-561. |
| APA | Xu K,Tian XJ,Wu CD,Liu J,Li MX,&Dong ZL.(2013).Study on the large-scale assembly and fabrication method for SWCNTs nano device.SCIENCE CHINA-PHYSICS MECHANICS & ASTRONOMY,56(3),556-561. |
| MLA | Xu K,et al."Study on the large-scale assembly and fabrication method for SWCNTs nano device".SCIENCE CHINA-PHYSICS MECHANICS & ASTRONOMY 56.3(2013):556-561. |
入库方式： OAI收割
来源：沈阳自动化研究所
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