Monte Carlo simulation of gas free molecular flow in turbo molecular pump’s inlet tube
文献类型:期刊论文
作者 | Sun, Kun2; Zhang, Shiwei2; Li, Yajie2; Zhang, Zhijun2; Li, Haitao2; Mu RY(牟如意)1 |
刊名 | Molecular Simulation |
出版日期 | 2018 |
卷号 | 44期号:15页码:1261-1269 |
ISSN号 | 0892-7022 |
关键词 | Monte Carlo Simulation Turbo Molecular Pump Inlet Tube Free Molecular Flow |
产权排序 | 2 |
英文摘要 | Due to the beaming effect of inlet tube and reflection effect of turbine cover in the turbo molecular pump, the positional and angular distribution of incident gas molecules (IGM) on the turbine blades would no longer be uniformly distributed. Based on the test particle Monte Caro method, a new self-defining procedure is proposed and it can be more accurate to describe the status of IGM into turbine blades. The results show that the influence of rotor speed on the transmission probability is indistinctive. Meanwhile, the incident density between the tip and root of the blades is distinct. The positional beaming effect and the angular beaming effect are enhanced with the lengthening of the tube and less molecule diverge towards the tube wall. The positive transmission probability of first-stage turbine blades using our new method is different from those obeying the cosine distribution under the same number of incident molecules. The calculation results of new method verified by another procedure are reasonable and accurate. |
WOS关键词 | STAGE TURBOMOLECULAR PUMP ; SINGLE-STAGE ; ANGULAR-DISTRIBUTION ; DESIGN ; OPERATION ; SPEED ; MODEL |
WOS研究方向 | Chemistry ; Physics |
语种 | 英语 |
WOS记录号 | WOS:000441735700012 |
源URL | [http://119.78.100.139/handle/173321/22137] |
专题 | 沈阳自动化研究所_装备制造技术研究室 |
通讯作者 | Zhang, Shiwei |
作者单位 | 1.Chinese Academy of Sciences, Shenyang Institute of Automation, Shenyang, China 2.School of Mechanical Engineering & Automation, Northeastern University, Shenyang, China |
推荐引用方式 GB/T 7714 | Sun, Kun,Zhang, Shiwei,Li, Yajie,et al. Monte Carlo simulation of gas free molecular flow in turbo molecular pump’s inlet tube[J]. Molecular Simulation,2018,44(15):1261-1269. |
APA | Sun, Kun,Zhang, Shiwei,Li, Yajie,Zhang, Zhijun,Li, Haitao,&Mu RY.(2018).Monte Carlo simulation of gas free molecular flow in turbo molecular pump’s inlet tube.Molecular Simulation,44(15),1261-1269. |
MLA | Sun, Kun,et al."Monte Carlo simulation of gas free molecular flow in turbo molecular pump’s inlet tube".Molecular Simulation 44.15(2018):1261-1269. |
入库方式: OAI收割
来源:沈阳自动化研究所
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