中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Monte Carlo simulation of gas free molecular flow in turbo molecular pump’s inlet tube

文献类型:期刊论文

作者Sun, Kun2; Zhang, Shiwei2; Li, Yajie2; Zhang, Zhijun2; Li, Haitao2; Mu RY(牟如意)1
刊名Molecular Simulation
出版日期2018
卷号44期号:15页码:1261-1269
ISSN号0892-7022
关键词Monte Carlo Simulation Turbo Molecular Pump Inlet Tube Free Molecular Flow
产权排序2
英文摘要

Due to the beaming effect of inlet tube and reflection effect of turbine cover in the turbo molecular pump, the positional and angular distribution of incident gas molecules (IGM) on the turbine blades would no longer be uniformly distributed. Based on the test particle Monte Caro method, a new self-defining procedure is proposed and it can be more accurate to describe the status of IGM into turbine blades. The results show that the influence of rotor speed on the transmission probability is indistinctive. Meanwhile, the incident density between the tip and root of the blades is distinct. The positional beaming effect and the angular beaming effect are enhanced with the lengthening of the tube and less molecule diverge towards the tube wall. The positive transmission probability of first-stage turbine blades using our new method is different from those obeying the cosine distribution under the same number of incident molecules. The calculation results of new method verified by another procedure are reasonable and accurate.

WOS关键词STAGE TURBOMOLECULAR PUMP ; SINGLE-STAGE ; ANGULAR-DISTRIBUTION ; DESIGN ; OPERATION ; SPEED ; MODEL
WOS研究方向Chemistry ; Physics
语种英语
WOS记录号WOS:000441735700012
源URL[http://119.78.100.139/handle/173321/22137]  
专题沈阳自动化研究所_装备制造技术研究室
通讯作者Zhang, Shiwei
作者单位1.Chinese Academy of Sciences, Shenyang Institute of Automation, Shenyang, China
2.School of Mechanical Engineering & Automation, Northeastern University, Shenyang, China
推荐引用方式
GB/T 7714
Sun, Kun,Zhang, Shiwei,Li, Yajie,et al. Monte Carlo simulation of gas free molecular flow in turbo molecular pump’s inlet tube[J]. Molecular Simulation,2018,44(15):1261-1269.
APA Sun, Kun,Zhang, Shiwei,Li, Yajie,Zhang, Zhijun,Li, Haitao,&Mu RY.(2018).Monte Carlo simulation of gas free molecular flow in turbo molecular pump’s inlet tube.Molecular Simulation,44(15),1261-1269.
MLA Sun, Kun,et al."Monte Carlo simulation of gas free molecular flow in turbo molecular pump’s inlet tube".Molecular Simulation 44.15(2018):1261-1269.

入库方式: OAI收割

来源:沈阳自动化研究所

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