A study on theoretical nano forces in AFM based nanomanipulation
文献类型：会议论文
| 作者 | Tian XJ(田孝军) ; Wang YC(王越超); Dong ZL(董再励)
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| 出版日期 | 2007 |
| 会议日期 | January 16-19, 2007 |
| 会议地点 | Bangkok, THAILAND |
| 关键词 | Nano Force Analysis Force Curve Nanomanipulation Atomic Force Microscope (Afm) |
| 页码 | 917-921 |
| 英文摘要 | As it is important to understand the basic mechanics principle in nanofabrication process, much research has been done about nano mechanics with different tools in different nano environments, and various kinds of nano force formula have been proposed. However, as the special case of AFM based nanomanipulation is considered, little about its mechanics principle under the micro probe's operation is known, such as what kinds of nano forces are the decisive factors and how they work, which are important to perform accurate control in nanomanipulation. To explore this subject, nano forces among tip, substrate and particle are analyzed, and simulation & experiments are performed to verify the rationality of the analysis. |
| 源文献作者 | IEEE |
| 产权排序 | 1 |
| 会议录 | 2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Vols 1-3
 |
| 会议录出版者 | IEEE |
| 会议录出版地 | NEW YORK |
| 语种 | 英语 |
| ISBN号 | 978-1-4244-0609-8 |
| WOS记录号 | WOS:000248619100148 |
| 源URL | [http://ir.sia.cn/handle/173321/8527]  |
| 专题 | 沈阳自动化研究所_机器人学研究室 |
| 作者单位 | Robotics Laboratory, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang 110016, China |
| 推荐引用方式 GB/T 7714 | Tian XJ,Wang YC,Dong ZL. A study on theoretical nano forces in AFM based nanomanipulation[C]. 见:. Bangkok, THAILAND. January 16-19, 2007. |
入库方式： OAI收割
来源：沈阳自动化研究所
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