Accurate positioning of AFM probe for AFM based robotic nanomanipulation system
文献类型：会议论文
| 作者 | Tian XJ(田孝军) ; Wang YC(王越超); Dong ZL(董再励); Li WJ(李文荣)
|
| 出版日期 | 2006 |
| 会议日期 | October 9-13, 2006 |
| 会议地点 | Beijing, China |
| 关键词 | Afm Probe Positioning Reappearing The Scanning Trajectory Kinematicss Coupling Errors Cantilever Deflections Nanomanipulation |
| 页码 | 1910-1914 |
| 英文摘要 | For AFM based robotic nanomanipulation system without displacement sensor, one of the key technical problems is to realize high accurate positioning of the AFM probe. To solve the problem, based on the hysteresis & nonlinear characteristics analysis of AFM PZT actuator, a new actuating method called "actuating method based on reappearing the scanning trajectory" is presented to actuate the PZT actuator. Then two kinds of probe positioning errors, namely kinematics coupling errors due to tube actuator's bend motion and probe tip's positioning errors caused by cantilever deflections, are compensated to further improve the probe's positioning accuracy. Nanopatterning experiments are performed to verify the effectiveness of the new actuating method and the compensation methods of probe positioning errors. |
| 源文献作者 | IEEE, RSJ |
| 产权排序 | 1 |
| 会议录 | 2006 IEEE/RSJ International Conference on Intelligent Robots and Systems, Vols 1-12
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| 会议录出版者 | IEEE |
| 会议录出版地 | NEW YORK |
| 语种 | 英语 |
| ISBN号 | 978-1-4244-0258-8 |
| WOS记录号 | WOS:000245452402007 |
| 源URL | [http://ir.sia.cn/handle/173321/8534]  |
| 专题 | 沈阳自动化研究所_机器人学研究室 |
| 作者单位 | 1.Department of Electrical and Computer Engineering, Michigan State University (MSU), United States 2.Robotics Laboratory, CAS, Shenyang Institute of Automation (SIA), China 3.Graduate School, CAS, Beijing, China |
| 推荐引用方式 GB/T 7714 | Tian XJ,Wang YC,Dong ZL,et al. Accurate positioning of AFM probe for AFM based robotic nanomanipulation system[C]. 见:. Beijing, China. October 9-13, 2006. |
入库方式： OAI收割
来源：沈阳自动化研究所
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