The modeling and experiments of a PVDF micro-force sensor
文献类型：会议论文
| 作者 | Liu YY(刘意杨) ; Yu P(于鹏); Wang YC(王越超); Dong ZL(董再励)
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| 出版日期 | 2008 |
| 会议日期 | January 6-9, 2008 |
| 会议地点 | Sanya, China |
| 关键词 | Sensor Micro-force Microassembly Pvdf |
| 页码 | 60-64 |
| 英文摘要 | This paper aims at designing a kind of advanced micro-force sensor that can measure force in the range of sub-micro-Newton (mu N). To accurately measure the micro interactive force (For example, adhesion, surface tension, friction, and assembly force) acting on micro devices during micromanipulation, the polyvinylidene fluoride (PVDF) is fabricated highly sensitive force sensors. This paper illustrates the modeling method of a PVDF sensor. The transformation between the micro interactive force and the output of the sensor is described. To calibrate the transformation, the model of the PVDF cantilever beam that shows the relationship between the interactive force and the deflection of the sensor probe tip is bunt first. Then, by given deflection, the interactive force can be calculated with the model. Finally, the transformation can be calibrated. Experiment results verify the effectiveness and accuracy of the transformation model, and the sub-mu N sensitivity of the sensor. This micro force sensing technology will solve an important problem that restricts the development of micromanipulation and batch assembly of micro devices. |
| 源文献作者 | IEEE, State Key Lab Multi Spectral Informat Proc Technol, Chinese Soc Micro Nano Technol, Ctr Micro & Nano Syst, IEEE Nanotechnol Council, Shenyang Inst Automat, Univ California, UCLA, Ctr Cell Control, Global Engn Technol Inst, Nanosurf AG, Smart Instruments Nanosci & Nanotechnol, US Army Int Technol Ctr, Pacific |
| 产权排序 | 1 |
| 会议录 | 2008 3RD IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, VOLS 1-3
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| 会议录出版者 | IEEE |
| 会议录出版地 | NEW YORK |
| 语种 | 英语 |
| ISBN号 | 978-1-4244-1907-4 |
| WOS记录号 | WOS:000257066200013 |
| 源URL | [http://ir.sia.cn/handle/173321/8910]  |
| 专题 | 沈阳自动化研究所_机器人学研究室 |
| 作者单位 | 1.State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Liaoning Province, China 2.Graduate School, Chinese Academy of Sciences, Beijing, China |
| 推荐引用方式 GB/T 7714 | Liu YY,Yu P,Wang YC,et al. The modeling and experiments of a PVDF micro-force sensor[C]. 见:. Sanya, China. January 6-9, 2008. |
入库方式： OAI收割
来源：沈阳自动化研究所
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