Improving atomic force microscopy imaging by a direct inverse asymmetric PI hysteresis model
文献类型：期刊论文
| 作者 | Wang D(王栋); Yu P(于鹏) ; Wang FF(王飞飞); Chan, Ho-Yin; Zhou L(周磊); Dong ZL(董再励); Liu LQ(刘连庆); Li WJ(李文荣)
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| 刊名 | SENSORS
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| 出版日期 | 2015 |
| 卷号 | 15期号:2页码:3409-3425 |
| 关键词 | Atomic Force Microscope Hysteresis Piezoelectric Actuator Direct Inverse Asymmetric Pi Model Feedforward Control |
| ISSN号 | 1424-8220 |
| 产权排序 | 1 |
| 英文摘要 | A modified Prandtl–Ishlinskii (PI) model, referred to as a direct inverse asymmetric PI (DIAPI) model in this paper, was implemented to reduce the displacement error between a predicted model and the actual trajectory of a piezoelectric actuator which is commonly found in AFM systems. Due to the nonlinearity of the piezoelectric actuator, the standard symmetric PI model cannot precisely describe the asymmetric motion of the actuator. In order to improve the accuracy of AFM scans, two series of slope parameters were introduced in the PI model to describe both the voltage-increase-loop (trace) and voltage-decrease-loop (retrace). A feedforward controller based on the DIAPI model was implemented to compensate hysteresis. Performance of the DIAPI model and the feedforward controller were validated by scanning micro-lenses and standard silicon grating using a custom-built AFM. © 2015 by the authors; licensee MDPI, Basel, Switzerland. |
| WOS关键词 | PRANDTL-ISHLINSKII MODEL ; COMPENSATION ; FEEDFORWARD ; ACTUATORS ; CREEP |
| WOS研究方向 | Chemistry ; Electrochemistry ; Instruments & Instrumentation |
| 语种 | 英语 |
| WOS记录号 | WOS:000351992700006 |
| 公开日期 | 2015-03-17 |
| 源URL | [http://ir.sia.cn/handle/173321/15753]  |
| 专题 | 沈阳自动化研究所_机器人学研究室 |
| 通讯作者 | Liu LQ(刘连庆); Li WJ(李文荣) |
| 作者单位 | 1.Department of Mechanical and Biomedical Engineering, City University of Hong Kong, Kowloon, Hong Kong 2.University of Chinese Academy of Sciences, Beijing 100049, China 3.State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang 110016, China |
| 推荐引用方式 GB/T 7714 | Wang D,Yu P,Wang FF,et al. Improving atomic force microscopy imaging by a direct inverse asymmetric PI hysteresis model[J]. SENSORS,2015,15(2):3409-3425. |
| APA | Wang D.,Yu P.,Wang FF.,Chan, Ho-Yin.,Zhou L.,...&Li WJ.(2015).Improving atomic force microscopy imaging by a direct inverse asymmetric PI hysteresis model.SENSORS,15(2),3409-3425. |
| MLA | Wang D,et al."Improving atomic force microscopy imaging by a direct inverse asymmetric PI hysteresis model".SENSORS 15.2(2015):3409-3425. |
入库方式： OAI收割
来源：沈阳自动化研究所
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