Rapid fabrication of functional CNT sensor arrays using micro-spotting and DEP technologies
文献类型：会议论文
| 作者 | Li WJ(李文荣)
|
| 出版日期 | 2006 |
| 会议日期 | October 22-25, 2006 |
| 会议地点 | Gyeongju, Korea, Republic of |
| 关键词 | Cnt Sensors Dep Manipulation Micro-robotics Nano-sensor Arrays |
| 页码 | 108-109 |
| 英文摘要 | Our team has developed a systematic process to rapidly construct Carbon Nanotube (CNT) sensors by combining DEP and micro-robotics technologies. Arrays of CNT sensors were fabricated on MUMPs chips using this systematic process and the CNT sensor characteristics were found to be very consistent with individual CNT sensors fabricated using basic manual DEP manipulation process. We have shown that the average time to fabricate CNT sensor using this process is ∼1 sec, which means that potentially 100,000 CNT components could be built in 24 hours. CNT Sensors, DEP Manipulation, Micro-robotics, Nano-sensor Arrays. |
| 产权排序 | 1 |
| 会议录 | 2006 IEEE Nanotechnology Materials and Devices Conference, NMDC
 |
| 会议录出版者 | IEEE Computer Society |
| 会议录出版地 | Piscataway, NJ, USA |
| 语种 | 英语 |
| ISBN号 | 978-1-4244-0540-4 |
| WOS记录号 | WOS:000254409500014 |
| 源URL | [http://ir.sia.cn/handle/173321/20019]  |
| 专题 | 沈阳自动化研究所_机器人学研究室 |
| 通讯作者 | Li WJ(李文荣) |
| 作者单位 | 1.Robotics and Automation Laboratory, Michigan State University, United States 2.Shenyang Institute of Automation, Chinese Academy of Sciences, China 3.Centre for Micro and Nano Systems, Chinese University of Hong Kong, Hong Kong, Hong Kong |
| 推荐引用方式 GB/T 7714 | Li WJ. Rapid fabrication of functional CNT sensor arrays using micro-spotting and DEP technologies[C]. 见:. Gyeongju, Korea, Republic of. October 22-25, 2006. |
入库方式： OAI收割
来源：沈阳自动化研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。