Reducing stick-slip motion in one-dimensional nano manipulation by real-time feedback control
文献类型:会议论文
作者 | Zhang, Jing; Miao L(缪磊)![]() ![]() |
出版日期 | 2010 |
会议日期 | August 17-20, 2010 |
会议地点 | Ilsan, Gyeonggi-Do, Korea |
页码 | 826-830 |
英文摘要 | When a micro cantilever with a nanoscale tip is manipulated on a substrate with atomic roughness, e.g., pushing an atomic-scale sample or etching the surface of the substrate to draw desired patterns, the periodical lateral frictional forces with stochastic fluctuations will induce stick-slip motion of the cantilever tip, which may greatly influence the precision of the nano manipulation. To reduce such a stick-slip motion, we propose a feedback control strategy based on the position estimation of the cantilever tip to compensate the periodical frictional force. Numerical simulations show that the motion of the cantilever tip under feedback control can track the desired trajectory asymptotically. Our proposal can aL be extended to the case when the cantilever tip moves over a Gaussian-shape defection on the substrate and when the stochastic fluctuations in the lateral force are with non-zero correlation time. |
产权排序 | 2 |
会议录 | 2010 10th IEEE Conference on Nanotechnology, NANO 2010
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会议录出版者 | IEEE Computer Society |
会议录出版地 | Piscataway, NJ, USA |
语种 | 英语 |
ISBN号 | 978-1-4244-7033-4 |
源URL | [http://ir.sia.cn/handle/173321/20047] ![]() |
专题 | 沈阳自动化研究所_机器人学研究室 |
通讯作者 | Zhang, Jing |
作者单位 | 1.Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI 48824, United States 2.State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Beijing, 110016, China 3.Department of Electrical and Systems Engineering, Washington University, St. Louis, MO 63130, United States 4.Department of Automation, Tsinghua University, Beijing 100084, China 5.Center for Quantum Information Science and Technology, Tsinghua National Laboratory for Information Science and Technology, Beijing 100084, China |
推荐引用方式 GB/T 7714 | Zhang, Jing,Miao L,Wu, Rebing,et al. Reducing stick-slip motion in one-dimensional nano manipulation by real-time feedback control[C]. 见:. Ilsan, Gyeonggi-Do, Korea. August 17-20, 2010. |
入库方式: OAI收割
来源:沈阳自动化研究所
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