中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Reducing stick-slip motion in one-dimensional nano manipulation by real-time feedback control

文献类型:会议论文

作者Zhang, Jing; Miao L(缪磊); Wu, Rebing; Li, Chunwen; Wang YC(王越超); Tarn, Tzyh Jong
出版日期2010
会议日期August 17-20, 2010
会议地点Ilsan, Gyeonggi-Do, Korea
页码826-830
英文摘要When a micro cantilever with a nanoscale tip is manipulated on a substrate with atomic roughness, e.g., pushing an atomic-scale sample or etching the surface of the substrate to draw desired patterns, the periodical lateral frictional forces with stochastic fluctuations will induce stick-slip motion of the cantilever tip, which may greatly influence the precision of the nano manipulation. To reduce such a stick-slip motion, we propose a feedback control strategy based on the position estimation of the cantilever tip to compensate the periodical frictional force. Numerical simulations show that the motion of the cantilever tip under feedback control can track the desired trajectory asymptotically. Our proposal can aL be extended to the case when the cantilever tip moves over a Gaussian-shape defection on the substrate and when the stochastic fluctuations in the lateral force are with non-zero correlation time.
产权排序2
会议录2010 10th IEEE Conference on Nanotechnology, NANO 2010
会议录出版者IEEE Computer Society
会议录出版地Piscataway, NJ, USA
语种英语
ISBN号978-1-4244-7033-4
源URL[http://ir.sia.cn/handle/173321/20047]  
专题沈阳自动化研究所_机器人学研究室
通讯作者Zhang, Jing
作者单位1.Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI 48824, United States
2.State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Beijing, 110016, China
3.Department of Electrical and Systems Engineering, Washington University, St. Louis, MO 63130, United States
4.Department of Automation, Tsinghua University, Beijing 100084, China
5.Center for Quantum Information Science and Technology, Tsinghua National Laboratory for Information Science and Technology, Beijing 100084, China
推荐引用方式
GB/T 7714
Zhang, Jing,Miao L,Wu, Rebing,et al. Reducing stick-slip motion in one-dimensional nano manipulation by real-time feedback control[C]. 见:. Ilsan, Gyeonggi-Do, Korea. August 17-20, 2010.

入库方式: OAI收割

来源:沈阳自动化研究所

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