Cross-scale additive direct-writing fabrication of micro/nano lens arrays by electrohydrodynamic jet printing
文献类型:期刊论文
作者 | Zhou PL(周培林)1,2,3![]() ![]() ![]() ![]() ![]() |
刊名 | Optics Express
![]() |
出版日期 | 2020 |
卷号 | 28期号:5页码:6336-6349 |
ISSN号 | 1094-4087 |
产权排序 | 1 |
英文摘要 | High-quality micro/nanolens arrays (M/NLAs) are becoming irreplaceable components of various compact and miniaturized optical systems and functional devices. There is urgent requirement for a low-cost, high-efficiency, and high-precision technique to manufacture high-quality M/NLAs to meet their diverse and personalized applications. In this paper, we report the one-step maskless fabrication of M/NLAs via electrohydrodynamic jet (E-jet) printing. In order to get the best morphological parameters of M/NLAs, we adopted the stable cone-jet printing mode with optimized parameters instead of the micro dripping mode. The optical parameters of M/NLAs were analyzed and optimized, and they were influenced by the E-jet printing parameters, the wettability of the substrate, and the viscosity of the UV-curable adhesive.,Thus, diverse and customized M/NLAs were obtained. Herein, we realized the fabrication of nanolens with a minimum diameter of 120 nm, and NLAs with different parameters were printed on a silicon substrate, a cantilever of atomic force microscopy probe, and single-layer graphene. |
WOS关键词 | POLYMER PHASE-SEPARATION ; HIGH NUMERICAL APERTURE ; MICROLENS ARRAYS ; SURFACE ; DESIGN ; INKJET |
资助项目 | National Natural Science Foundation of China[61727811] ; National Natural Science Foundation of China[61973298] ; National Natural Science Foundation of China[91748212] ; National Natural Science Foundation of China[U1613220] ; National Natural Science Foundation of China[61821005] ; Youth Innovation Promotion Association of the Chinese Academy of Sciences ; CAS-SAFEA International Partnership Program for Creative Research Teams |
WOS研究方向 | Optics |
语种 | 英语 |
WOS记录号 | WOS:000518435600035 |
资助机构 | National Natural Science Foundation of China (61727811, 61973298, 91748212, U1613220, 61821005) ; Youth Innovation Promotion Association of the Chinese Academy of Sciences ; CAS-SAFEA International Partnership Program for Creative Research Teams |
源URL | [http://ir.sia.cn/handle/173321/26444] ![]() |
专题 | 沈阳自动化研究所_机器人学研究室 |
通讯作者 | Yu HB(于海波); Liu LQ(刘连庆) |
作者单位 | 1.University of Chinese Academy of Sciences, Beijing 100049, China 2.Institutes for Robotics and Intelligent Manufacturing, Chinese Academy of Sciences, Shenyang 110169, China 3.State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang 110016, China 4.Department of Advanced Robotics, Chiba Institute of Technology, Chiba 275-0016, Japan |
推荐引用方式 GB/T 7714 | Zhou PL,Yu HB,Zou WH,et al. Cross-scale additive direct-writing fabrication of micro/nano lens arrays by electrohydrodynamic jet printing[J]. Optics Express,2020,28(5):6336-6349. |
APA | Zhou PL.,Yu HB.,Zou WH.,Zhong Y.,Wang XD.,...&Liu LQ.(2020).Cross-scale additive direct-writing fabrication of micro/nano lens arrays by electrohydrodynamic jet printing.Optics Express,28(5),6336-6349. |
MLA | Zhou PL,et al."Cross-scale additive direct-writing fabrication of micro/nano lens arrays by electrohydrodynamic jet printing".Optics Express 28.5(2020):6336-6349. |
入库方式: OAI收割
来源:沈阳自动化研究所
其他版本
除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。