中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Cross-scale additive direct-writing fabrication of micro/nano lens arrays by electrohydrodynamic jet printing

文献类型:期刊论文

作者Zhou PL(周培林)1,2,3; Yu HB(于海波)2,3; Zou WH(邹旿昊)1,2,3; Zhong Y(仲亚)1,2,3; Wang XD(王晓朵)2,3; Wang ZD(王志东)3,4; Liu LQ(刘连庆)2,3
刊名Optics Express
出版日期2020
卷号28期号:5页码:6336-6349
ISSN号1094-4087
产权排序1
英文摘要

High-quality micro/nanolens arrays (M/NLAs) are becoming irreplaceable components of various compact and miniaturized optical systems and functional devices. There is urgent requirement for a low-cost, high-efficiency, and high-precision technique to manufacture high-quality M/NLAs to meet their diverse and personalized applications. In this paper, we report the one-step maskless fabrication of M/NLAs via electrohydrodynamic jet (E-jet) printing. In order to get the best morphological parameters of M/NLAs, we adopted the stable cone-jet printing mode with optimized parameters instead of the micro dripping mode. The optical parameters of M/NLAs were analyzed and optimized, and they were influenced by the E-jet printing parameters, the wettability of the substrate, and the viscosity of the UV-curable adhesive.,Thus, diverse and customized M/NLAs were obtained. Herein, we realized the fabrication of nanolens with a minimum diameter of 120 nm, and NLAs with different parameters were printed on a silicon substrate, a cantilever of atomic force microscopy probe, and single-layer graphene.

WOS关键词POLYMER PHASE-SEPARATION ; HIGH NUMERICAL APERTURE ; MICROLENS ARRAYS ; SURFACE ; DESIGN ; INKJET
资助项目National Natural Science Foundation of China[61727811] ; National Natural Science Foundation of China[61973298] ; National Natural Science Foundation of China[91748212] ; National Natural Science Foundation of China[U1613220] ; National Natural Science Foundation of China[61821005] ; Youth Innovation Promotion Association of the Chinese Academy of Sciences ; CAS-SAFEA International Partnership Program for Creative Research Teams
WOS研究方向Optics
语种英语
WOS记录号WOS:000518435600035
资助机构National Natural Science Foundation of China (61727811, 61973298, 91748212, U1613220, 61821005) ; Youth Innovation Promotion Association of the Chinese Academy of Sciences ; CAS-SAFEA International Partnership Program for Creative Research Teams
源URL[http://ir.sia.cn/handle/173321/26444]  
专题沈阳自动化研究所_机器人学研究室
通讯作者Yu HB(于海波); Liu LQ(刘连庆)
作者单位1.University of Chinese Academy of Sciences, Beijing 100049, China
2.Institutes for Robotics and Intelligent Manufacturing, Chinese Academy of Sciences, Shenyang 110169, China
3.State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang 110016, China
4.Department of Advanced Robotics, Chiba Institute of Technology, Chiba 275-0016, Japan
推荐引用方式
GB/T 7714
Zhou PL,Yu HB,Zou WH,et al. Cross-scale additive direct-writing fabrication of micro/nano lens arrays by electrohydrodynamic jet printing[J]. Optics Express,2020,28(5):6336-6349.
APA Zhou PL.,Yu HB.,Zou WH.,Zhong Y.,Wang XD.,...&Liu LQ.(2020).Cross-scale additive direct-writing fabrication of micro/nano lens arrays by electrohydrodynamic jet printing.Optics Express,28(5),6336-6349.
MLA Zhou PL,et al."Cross-scale additive direct-writing fabrication of micro/nano lens arrays by electrohydrodynamic jet printing".Optics Express 28.5(2020):6336-6349.

入库方式: OAI收割

来源:沈阳自动化研究所

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