Super-resolution Monitoring of React-on-demand Photo-assisted Electrochemical Printing via Microsphere Nanoscopy
文献类型：会议论文
| 作者 | Li P(李盼)2,3,6 ; Yu HB(于海波)2,3; Wang FF(王飞飞)1; Lee, Gwo-Bin4; Liu LQ(刘连庆)2,3; Li WJ(李文荣)5
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| 出版日期 | 2020 |
| 会议日期 | October 31 - November 2, 2019 |
| 会议地点 | Shenzhen, China |
| 关键词 | dielectric microsphere nanoscopy superresolution imaging micro/nanofabrication real-time |
| 页码 | 63-67 |
| 英文摘要 | Nanoscale material surface patterning on semiconductor requires multi-scale measurements for the determination of their geometric dimensions and shapes. In this paper, we propose an in-situ,real-time super-resolution imaging technique using a simple microsphere microlens to monitor the dynamic process of photo-assisted electrochemical printing in a microfluidic chip. The microsphere microlens with diameters of 30 60 μ m were set close to a semiconductor surface to image the electrochemical printing process underneath. With the microsphere-based imaging system, both the depositing process of silver nanoparticles with 200 nm 300 nm in diameter and the growing process of silver belts were observed. Also, we experimentally observed how a typical 120° angle formed at the terminal of a silver belt through the microsphere superlens. Super-resolution monitoring ability provided by microsphere lens will shine a light on the sub-diffraction process of micro/nano fabrication. |
| 产权排序 | 1 |
| 会议录 | Proceedings of the 2st IEEE International Conference on Micro/Nano Sensors for AI, Healthcare and Robotics, NSENS 2019
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| 会议录出版者 | IEEE |
| 会议录出版地 | New York |
| 语种 | 英语 |
| ISBN号 | 978-1-7281-6651-3 |
| 源URL | [http://ir.sia.cn/handle/173321/28163]  |
| 专题 | 沈阳自动化研究所_机器人学研究室 |
| 通讯作者 | Liu LQ(刘连庆) |
| 作者单位 | 1.Department of Chemistry, Stanford University, Stanford, California 94305, United States 2.Institutes for Robotics and Intelligent Manufacturing, CAS, Shenyang 110016, China 3.State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences (CAS), Shenyang 110016, China 4.Department of Power Mechanical Engineering, National Tsing Hua University, Hsinchu, Taiwan 5.Department of Mechanical and Biomedical Engineering, City University of Hong Kong, Kowloon Tong, Hong Kong 6.University of the Chinese Academy of Sciences, Beijing 100049, China |
| 推荐引用方式 GB/T 7714 | Li P,Yu HB,Wang FF,et al. Super-resolution Monitoring of React-on-demand Photo-assisted Electrochemical Printing via Microsphere Nanoscopy[C]. 见:. Shenzhen, China. October 31 - November 2, 2019. |
入库方式： OAI收割
来源：沈阳自动化研究所
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