Automatic AFM Images Distortion Correction Based on Adaptive Feature Recognition Algorithm
文献类型:会议论文
作者 | Yang, Chengpeng2,3; Wang, Shoujin3; Hao, Chunxue2,3; Yang Y(杨洋)1,2![]() ![]() ![]() |
出版日期 | 2020 |
会议日期 | November 6-8, 2023 |
会议地点 | Shanghai, China |
关键词 | AFM edge detection adaptive threshold least squares fitting horizontal distortion |
页码 | 4981-4986 |
英文摘要 | Atomic Force Microscope (AFM) images will appear tilt and bending of the image background due to the tilt angle between the sample surface and the probe, thermal noise of system, or external vibration of environment. Feature recognition is very crucial for removing unstable imaging background when using the least square fitting method to horizontally correct the AFM full image, which the topography structures higher or lower than the sample substrate will affect the fitting correction results. To realize universal automatic correction of AFM images, this paper proposes an adaptive feature recognition algorithm based on improved image edge detection method to automatically identify, frame and mark the features and then remove the detorsion background using Least Squares Fitting Correction. The experiment results show that this method can realize adaptive feature recognition and automatic fitting correction of the whole image, and improve the correction accuracy. |
产权排序 | 1 |
会议录 | Proceedings - 2020 Chinese Automation Congress, CAC 2020
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会议录出版者 | IEEE |
会议录出版地 | New York |
语种 | 英语 |
ISBN号 | 978-1-7281-7687-1 |
WOS记录号 | WOS:000678697005017 |
源URL | [http://ir.sia.cn/handle/173321/28369] ![]() |
专题 | 沈阳自动化研究所_机器人学研究室 |
通讯作者 | Yang, Chengpeng |
作者单位 | 1.Institutes for Robotics and Intelligent Manufacturing, Chinese Academy of Sciences, Shenyang, China 2.State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang, China 3.School of Information and Control Engineering, Shenyang Jianzhu University |
推荐引用方式 GB/T 7714 | Yang, Chengpeng,Wang, Shoujin,Hao, Chunxue,et al. Automatic AFM Images Distortion Correction Based on Adaptive Feature Recognition Algorithm[C]. 见:. Shanghai, China. November 6-8, 2023. |
入库方式: OAI收割
来源:沈阳自动化研究所
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