High-resolution additive direct writing of metal micro/nanostructures by electrohydrodynamic jet printing
文献类型:期刊论文
作者 | Zou WH(邹旿昊)1,2,3![]() ![]() ![]() ![]() ![]() |
刊名 | Applied Surface Science
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出版日期 | 2021 |
卷号 | 543页码:1-10 |
关键词 | E-jet printing Mask-free direct writing Nanoscale printing resolution Metal micro/nanoelectrodes Fully printed graphene photodetectors |
ISSN号 | 0169-4332 |
产权排序 | 1 |
英文摘要 | Patterned conductive structures have attracted significant attention as important components of printed and flexible micro/nanodevices. However, the fabrication of conductive micro/nanostructures with controlled and well-organized morphologies is a key challenge in the development and application of micro/nanoelectronic devices based on low-dimensional materials. To meet the requirements of depositing conductive structures on specific substrates, electrohydrodynamic jet (E-jet) printing, developed as a simple and effective method for fabricating micro/nanopatterns of polymers, was combined with a conventional wet metal etching process for patterning conductive metals on polymer substrates. Under optimized experimental conditions, we achieved fine straight-line patterns with a line spacing of 1 μm at a nanoscale printing resolution (average line width: 68 nm) and grid patterns with variable spacings and grid line widths, down to size of 871 nm. Furthermore, fully printed graphene photodetectors were obtained through in situ direct writing, and their photoelectric response to a change in photocurrent of 0.22 μA was demonstrated. The results suggest that combining E-jet printing with chemical etching is a promising mask-free approach for producing conductive metal patterns for micro/nanoelectronic devices. |
资助项目 | National Natural Science Foundation of China[61925307] ; National Natural Science Foundation of China[61727811] ; National Natural Science Foundation of China[91748212] ; National Natural Science Foundation of China[U1613220] ; National Natural Science Foundation of China[61821005] ; External Cooperation Program of the Chinese Academy of Sciences[173321KYSB20170015] ; Youth Innovation Promotion Association of the Chinese Academy of Sciences[Y201943] ; LiaoNing Revitalization Talents Program[XLYC1807006] |
WOS研究方向 | Chemistry ; Materials Science ; Physics |
语种 | 英语 |
WOS记录号 | WOS:000613951500003 |
资助机构 | National Natural Science Foundation of China (Grant Nos. 61925307, 61727811, 91748212, U1613220, and 61821005) ; External Cooperation Program of the Chinese Academy of Sciences (Grant No. 173321KYSB20170015) ; Youth Innovation Promotion Association of the Chinese Academy of Sciences (Grant No. Y201943) ; LiaoNing Revitalization Talents Program (Grant No. XLYC1807006) |
源URL | [http://ir.sia.cn/handle/173321/28407] ![]() |
专题 | 沈阳自动化研究所_机器人学研究室 |
通讯作者 | Yu HB(于海波); Liu LQ(刘连庆) |
作者单位 | 1.Institutes for Robotics and Intelligent Manufacturing, Chinese Academy of Sciences, Shenyang 110016, China 2.University of Chinese Academy of Sciences, Beijing 100049, China 3.State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang 110016, China |
推荐引用方式 GB/T 7714 | Zou WH,Yu HB,Zhou PL,et al. High-resolution additive direct writing of metal micro/nanostructures by electrohydrodynamic jet printing[J]. Applied Surface Science,2021,543:1-10. |
APA | Zou WH,Yu HB,Zhou PL,Zhong Y,Wang YC,&Liu LQ.(2021).High-resolution additive direct writing of metal micro/nanostructures by electrohydrodynamic jet printing.Applied Surface Science,543,1-10. |
MLA | Zou WH,et al."High-resolution additive direct writing of metal micro/nanostructures by electrohydrodynamic jet printing".Applied Surface Science 543(2021):1-10. |
入库方式: OAI收割
来源:沈阳自动化研究所
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