中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
High-resolution additive direct writing of metal micro/nanostructures by electrohydrodynamic jet printing

文献类型:期刊论文

作者Zou WH(邹旿昊)1,2,3; Yu HB(于海波)1,3; Zhou PL(周培林)1,2,3; Zhong Y(仲亚)1,2,3; Wang YC(王越超)1,3; Liu LQ(刘连庆)1,3
刊名Applied Surface Science
出版日期2021
卷号543页码:1-10
ISSN号0169-4332
关键词E-jet printing Mask-free direct writing Nanoscale printing resolution Metal micro/nanoelectrodes Fully printed graphene photodetectors
产权排序1
英文摘要

Patterned conductive structures have attracted significant attention as important components of printed and flexible micro/nanodevices. However, the fabrication of conductive micro/nanostructures with controlled and well-organized morphologies is a key challenge in the development and application of micro/nanoelectronic devices based on low-dimensional materials. To meet the requirements of depositing conductive structures on specific substrates, electrohydrodynamic jet (E-jet) printing, developed as a simple and effective method for fabricating micro/nanopatterns of polymers, was combined with a conventional wet metal etching process for patterning conductive metals on polymer substrates. Under optimized experimental conditions, we achieved fine straight-line patterns with a line spacing of 1 μm at a nanoscale printing resolution (average line width: 68 nm) and grid patterns with variable spacings and grid line widths, down to size of 871 nm. Furthermore, fully printed graphene photodetectors were obtained through in situ direct writing, and their photoelectric response to a change in photocurrent of 0.22 μA was demonstrated. The results suggest that combining E-jet printing with chemical etching is a promising mask-free approach for producing conductive metal patterns for micro/nanoelectronic devices.

资助项目National Natural Science Foundation of China[61925307] ; National Natural Science Foundation of China[61727811] ; National Natural Science Foundation of China[91748212] ; National Natural Science Foundation of China[U1613220] ; National Natural Science Foundation of China[61821005] ; External Cooperation Program of the Chinese Academy of Sciences[173321KYSB20170015] ; Youth Innovation Promotion Association of the Chinese Academy of Sciences[Y201943] ; LiaoNing Revitalization Talents Program[XLYC1807006]
WOS研究方向Chemistry ; Materials Science ; Physics
语种英语
WOS记录号WOS:000613951500003
资助机构National Natural Science Foundation of China (Grant Nos. 61925307, 61727811, 91748212, U1613220, and 61821005) ; External Cooperation Program of the Chinese Academy of Sciences (Grant No. 173321KYSB20170015) ; Youth Innovation Promotion Association of the Chinese Academy of Sciences (Grant No. Y201943) ; LiaoNing Revitalization Talents Program (Grant No. XLYC1807006)
源URL[http://ir.sia.cn/handle/173321/28407]  
专题沈阳自动化研究所_机器人学研究室
通讯作者Yu HB(于海波); Liu LQ(刘连庆)
作者单位1.Institutes for Robotics and Intelligent Manufacturing, Chinese Academy of Sciences, Shenyang 110016, China
2.University of Chinese Academy of Sciences, Beijing 100049, China
3.State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang 110016, China
推荐引用方式
GB/T 7714
Zou WH,Yu HB,Zhou PL,et al. High-resolution additive direct writing of metal micro/nanostructures by electrohydrodynamic jet printing[J]. Applied Surface Science,2021,543:1-10.
APA Zou WH,Yu HB,Zhou PL,Zhong Y,Wang YC,&Liu LQ.(2021).High-resolution additive direct writing of metal micro/nanostructures by electrohydrodynamic jet printing.Applied Surface Science,543,1-10.
MLA Zou WH,et al."High-resolution additive direct writing of metal micro/nanostructures by electrohydrodynamic jet printing".Applied Surface Science 543(2021):1-10.

入库方式: OAI收割

来源:沈阳自动化研究所

浏览0
下载0
收藏0
其他版本

除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。