中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
In Situ Electrohydrodynamic Jet Printing-Based Fabrication of Tunable Microlens Arrays

文献类型:期刊论文

作者Zhong Y(仲亚)1,2,3; Yu HB(于海波)2,3; Zhou PL(周培林)4; Wen YD(文扬东)1,2,3; Zhao WX(赵文秀)1,2,3; Zou WH(邹旿昊)1,2,3; Luo H(罗昊)1,2,3; Wang YC(王越超)2,3; Liu LQ(刘连庆)2,3
刊名ACS Applied Materials and Interfaces
出版日期2021
卷号13期号:33页码:39550−39560
关键词E-jet printing tunable microlens array electrowetting on dielectric in situ fabrication electrode structure
ISSN号1944-8244
产权排序1
英文摘要

Tunable microlens arrays (MLAs) with controllable focal lengths have been extensively used in optical sensors, biochips, and electronic devices. The commonly used method is electrowetting on dielectric (EWOD) that controls the contact angle of the microlens to adjust the focal length. However, the fabrication of tunable MLAs at the microscale remains a challenge because the size of MLAs is limited by the external electrodes of EWOD. In this study, a highly integrated planar annular microelectrode array was proposed to achieve an electrowetting tunable MLA. The planar microelectrode was fabricated by electrohydrodynamic jet (E-jet) printing and the liquid microlens was then deposited in situ on the microelectrode. This method could realize 36 tunable liquid microlenses with an average diameter of 24 μm in a 320 × 320 μm2 plane. The fabricated tunable MLAs with higher integration levels and smaller sizes can be beneficial for cell imaging, optofluidic systems, and microfluidic chips.

WOS关键词ARTIFICIAL COMPOUND EYES ; LIQUID MICROLENS ; LENS ARRAYS ; SOLAR-CELL ; INTEGRATION
资助项目National Natural Science Foundation of China[61925307] ; National Natural Science Foundation of China[61727811] ; National Natural Science Foundation of China[61973298] ; National Natural Science Foundation of China[61803366] ; National Natural Science Foundation of China[61821005] ; External Cooperation Program of the Chinese Academy of Sciences[173321KYSB20170015] ; CAS Interdisciplinary Innovation Team[JCTD-2019-09] ; Liaoning Revitalization Talents Program[XLYC1807006] ; Youth Innovation Promotion Association of the Chinese Academy of Sciences[Y201943]
WOS研究方向Science & Technology - Other Topics ; Materials Science
语种英语
WOS记录号WOS:000691785200059
资助机构National Natural Science Foundation of China (Grant Nos. 61925307, 61727811, 61973298, 61803366, and 61821005) ; External Cooperation Program of the Chinese Academy of Sciences (Grant No. 173321KYSB20170015) ; CAS Interdisciplinary Innovation Team (JCTD-2019-09) ; Liaoning Revitalization Talents Program (Grant No. XLYC1807006) ; Youth Innovation Promotion Association of the Chinese Academy of Sciences (Grant No. Y201943)
源URL[http://ir.sia.cn/handle/173321/29577]  
专题沈阳自动化研究所_机器人学研究室
通讯作者Yu HB(于海波); Liu LQ(刘连庆)
作者单位1.University of Chinese Academy of Sciences, Beijing 100049, China
2.State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang 110016, China
3.Institutes for Robotics and Intelligent Manufacturing, Chinese Academy of Sciences, Shenyang 110016, China
4.College of Mechanical and Electrical Engineering, Henan Agricultural University, Zhengzhou 450002, China
推荐引用方式
GB/T 7714
Zhong Y,Yu HB,Zhou PL,et al. In Situ Electrohydrodynamic Jet Printing-Based Fabrication of Tunable Microlens Arrays[J]. ACS Applied Materials and Interfaces,2021,13(33):39550−39560.
APA Zhong Y.,Yu HB.,Zhou PL.,Wen YD.,Zhao WX.,...&Liu LQ.(2021).In Situ Electrohydrodynamic Jet Printing-Based Fabrication of Tunable Microlens Arrays.ACS Applied Materials and Interfaces,13(33),39550−39560.
MLA Zhong Y,et al."In Situ Electrohydrodynamic Jet Printing-Based Fabrication of Tunable Microlens Arrays".ACS Applied Materials and Interfaces 13.33(2021):39550−39560.

入库方式: OAI收割

来源:沈阳自动化研究所

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