Systematic Analyses of Passive Vibration Isolation System for Atomic Force Microscopes
文献类型：会议论文
| 作者 | Zhai SH(翟胜杭)1,2,3; Yu P(于鹏)2,3 ; Shi JL(施佳林)2,3; Yang T(杨铁)2,3; Liu LQ(刘连庆)2,3
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| 出版日期 | 2021 |
| 会议日期 | October 22-25, 2021 |
| 会议地点 | Yantai, China |
| 关键词 | Atomic force microscope High precision imaging Passive vibration isolation |
| 页码 | 428-439 |
| 英文摘要 | Atomic force microscope (AFM) is a powerful tool for imaging a wide range of materials with nanometer resolution, which is sensitive to mechanical vibration from the ground or buildings. For improving imaging performance, vibration isolation systems are often employed. Air tables are often used to attenuate the vibration transmission from ground to precision instruments, but it performs poorly for low-frequency vibration isolation. Suspending AFM using long common bungee cords is a simple and effective vibration isolation method which perform well in both low-frequency and high-frequency domain. However, it requires a lot of space and the bungee cords will failure when using a long time. Here we developed a vibration isolation system that uses linear steel springs to suspend the AFM for high precision imaging. The simplified model is used to explain how the spring constant and the damper affects the vibration isolation performance, through experiment the relationship between the spring constant and the damper was verified. The accelerometer and the AFM were employed to show the isolation performance, it shows the noise level of the AFM can be reduced from 71 pm to 21 pm. © 2021, Springer Nature Switzerland AG. |
| 产权排序 | 1 |
| 会议录 | 2021 14th International Conference on Intelligent Robotics and Applications, ICIRA 2021
 |
| 会议录出版者 | Springer Science and Business Media Deutschland GmbH |
| 会议录出版地 | Berlin |
| 语种 | 英语 |
| ISSN号 | 0302-9743 |
| ISBN号 | 978-3-030-89097-1 |
| WOS记录号 | WOS:000725394600041 |
| 源URL | [http://ir.sia.cn/handle/173321/29858]  |
| 专题 | 沈阳自动化研究所_机器人学研究室 |
| 通讯作者 | Liu LQ(刘连庆) |
| 作者单位 | 1.University of Chinese Academy of Sciences, Beijing, China 2.Institutes for Robotics and Intelligent Manufacturing, Chinese Academy of Sciences, Shenyang, 110169, China 3.State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang, China |
| 推荐引用方式 GB/T 7714 | Zhai SH,Yu P,Shi JL,et al. Systematic Analyses of Passive Vibration Isolation System for Atomic Force Microscopes[C]. 见:. Yantai, China. October 22-25, 2021. |
入库方式： OAI收割
来源：沈阳自动化研究所
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