Recent Advances in Femtosecond Laser Fabrication: from Structures to Applications
文献类型:期刊论文
作者 | Wen YD(文扬东)2,3,4![]() ![]() ![]() ![]() ![]() ![]() ![]() |
刊名 | IEEE Open Journal of Nanotechnology
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出版日期 | 2021 |
卷号 | 2页码:161-177 |
关键词 | femtosecond laser micro/nanostructures laser ablation two-photon polymerization (TPP) |
ISSN号 | 2644-1292 |
产权排序 | 1 |
英文摘要 | Femtosecond laser processing is fast becoming a pervasive method for fabricating micro/nanostructures because it can be used to produce micro/nanostructures on myriads of materials with high precision and resolution, requires little control over environmental conditions, and is simple to implement. Here, we review recent developments in the use of femtosecond lasers for the fabrication of micro/nanostructures through ablation and two-photon polymerization (TPP). Moreover, the applications of some of the fabricated micro/nanostructures are also discussed. We highlight the advantages of femtosecond laser processing by explaining the underlying principles of laser ablation and TPP. We also show the use of this method to fabricate new devices with outstanding performance in several application realm, such as sensors, optical devices, microfluidic chips, and soft robotics. |
语种 | 英语 |
资助机构 | National Key R&D Program of China (Project No. 2018YFB1304904), the National Natural Science Foundation of China (Grant Nos. 61925307, 61727811, U1613220, and 61821005) ; External Cooperation Program of the Chinese Academy of Sciences (Grant No. 173321KYSB20170015) ; CAS Interdisciplinary Innovation Team (JCTD-2019-09) ; Youth Innovation Promotion Association of the Chinese Academy of Sciences (Grant No. Y201943) ; Hong Kong Research Grants Council (Project Nos. 11216120, 11210819, and JLFS/E-104/18). |
源URL | [http://ir.sia.cn/handle/173321/30078] ![]() |
专题 | 沈阳自动化研究所_机器人学研究室 |
通讯作者 | Liu LQ(刘连庆); Li WJ(李文荣) |
作者单位 | 1.Department of Mechanical Engineering, City University of Hong Kong, Hong Kong, SAR, China 2.State Key Laboratory of Robotics (SKLR), Shenyang Institute of Automation (SIA), Chinese Academy of Sciences (CAS), Shenyang 110016, China 3.Institutes for Robotics and Intelligent Manufacturing (IRIM), CAS, Shenyang 110016, China 4.University of Chinese Academy of Sciences, Beijing 100049, China 5.College of Optoelectronic Engineering, Shenzhen University, Shenzhen, China |
推荐引用方式 GB/T 7714 | Wen YD,Yu HB,Zhang YZ,et al. Recent Advances in Femtosecond Laser Fabrication: from Structures to Applications[J]. IEEE Open Journal of Nanotechnology,2021,2:161-177. |
APA | Wen YD.,Yu HB.,Zhang YZ.,Qiu Y.,Li PW.,...&Li WJ.(2021).Recent Advances in Femtosecond Laser Fabrication: from Structures to Applications.IEEE Open Journal of Nanotechnology,2,161-177. |
MLA | Wen YD,et al."Recent Advances in Femtosecond Laser Fabrication: from Structures to Applications".IEEE Open Journal of Nanotechnology 2(2021):161-177. |
入库方式: OAI收割
来源:沈阳自动化研究所
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