A Reliable Method for Removing Fabry-Perot Effect in Material Characterization with Terahertz Time-Domain Spectroscopy
文献类型:期刊论文
作者 | Liu DY(刘大有)1,2,4,5,6![]() ![]() |
刊名 | IEEE Transactions on Terahertz Science and Technology
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出版日期 | 2020 |
卷号 | 10期号:5页码:443-452 |
关键词 | Terahertz Material Characterization Fabry-Perot effect Time domain Optical Thin Sample |
ISSN号 | 2156-342X |
产权排序 | 1 |
英文摘要 | Terahertz Time-Domain Spectroscopy (THz-TDS) has been a powerful tool for material characterization. The Fabry-Perot (FP) effect caused by the multiple reflections within the sample exists inherently, which makes the echoes contaminated. In the case of thin samples, different reflection signals may merge together and even the echoes corresponding to the main reflection disappears, making the characterization improper or impossible. To deal with this problem, a novel time-domain optimization method is proposed for removing the FP effect. By introducing a new term which describes the variation of the waveform in time-domain, not only the complex refractive index but also the thickness of material are obtained for a very thin silicon wafer (~100 m) whose thickness is less than 2/3 lambda at the central frequency of the THz-TDS system. The accuracy of the algorithm is quite comparable to the iterative method, which is considered to be the most accurate one at the moment, but it is more than 100 times' faster, with a better convergence performance. Hence, it is promising for rapid material scenarios, like the in-line quality control and imaging-related applications. |
WOS关键词 | EXTRACTION ; THICKNESS |
资助项目 | Independent Project of Robotics and Intelligent Manufacturing Innovation Institute, Chinese Academy of Sciences[C2019001] ; National Natural Science Foundation of China[61804160] ; National Natural Science Foundation of China[61801467] |
WOS研究方向 | Engineering ; Optics ; Physics |
语种 | 英语 |
WOS记录号 | WOS:000566336300002 |
资助机构 | Independent project of robotics and intelligent manufacturing innovation institute, Chinese Academy of Sciences (C2019001) ; National Natural Science Foundation of China (NSFC) (61804160, 61801467) |
源URL | [http://ir.sia.cn/handle/173321/27179] ![]() |
专题 | 沈阳自动化研究所_光电信息技术研究室 |
通讯作者 | Qi F(祁峰) |
作者单位 | 1.Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang, Liaoning 110016 2.Institutes for Robotics and Intelligent Manufacturing, Chinese Academy of Sciences, Shenyang, Liaoning 110169 3.State Grid Liaoning Electric Power Company Limited Economic Research Institute, Shenyang Liaoning, China, 110015 4.University of Chinese Academy of Sciences, Beijing, 100049 China 5.Key Laboratory of Image Understanding and Computer Vision, Shenyang, Liaoning 110016 China 6.Key Laboratory of Opto-Electronic Information Process, Shenyang, Liaoning 110016 China |
推荐引用方式 GB/T 7714 | Liu DY,Lu TQ,Qi F. A Reliable Method for Removing Fabry-Perot Effect in Material Characterization with Terahertz Time-Domain Spectroscopy[J]. IEEE Transactions on Terahertz Science and Technology,2020,10(5):443-452. |
APA | Liu DY,Lu TQ,&Qi F.(2020).A Reliable Method for Removing Fabry-Perot Effect in Material Characterization with Terahertz Time-Domain Spectroscopy.IEEE Transactions on Terahertz Science and Technology,10(5),443-452. |
MLA | Liu DY,et al."A Reliable Method for Removing Fabry-Perot Effect in Material Characterization with Terahertz Time-Domain Spectroscopy".IEEE Transactions on Terahertz Science and Technology 10.5(2020):443-452. |
入库方式: OAI收割
来源:沈阳自动化研究所
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