中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
A Reliable Method for Removing Fabry-Perot Effect in Material Characterization with Terahertz Time-Domain Spectroscopy

文献类型:期刊论文

作者Liu DY(刘大有)1,2,4,5,6; Lu TQ(卢天琪)3; Qi F(祁峰)1,2,5,6
刊名IEEE Transactions on Terahertz Science and Technology
出版日期2020
卷号10期号:5页码:443-452
关键词Terahertz Material Characterization Fabry-Perot effect Time domain Optical Thin Sample
ISSN号2156-342X
产权排序1
英文摘要

Terahertz Time-Domain Spectroscopy (THz-TDS) has been a powerful tool for material characterization. The Fabry-Perot (FP) effect caused by the multiple reflections within the sample exists inherently, which makes the echoes contaminated. In the case of thin samples, different reflection signals may merge together and even the echoes corresponding to the main reflection disappears, making the characterization improper or impossible. To deal with this problem, a novel time-domain optimization method is proposed for removing the FP effect. By introducing a new term which describes the variation of the waveform in time-domain, not only the complex refractive index but also the thickness of material are obtained for a very thin silicon wafer (~100 m) whose thickness is less than 2/3 lambda at the central frequency of the THz-TDS system. The accuracy of the algorithm is quite comparable to the iterative method, which is considered to be the most accurate one at the moment, but it is more than 100 times' faster, with a better convergence performance. Hence, it is promising for rapid material scenarios, like the in-line quality control and imaging-related applications.

WOS关键词EXTRACTION ; THICKNESS
资助项目Independent Project of Robotics and Intelligent Manufacturing Innovation Institute, Chinese Academy of Sciences[C2019001] ; National Natural Science Foundation of China[61804160] ; National Natural Science Foundation of China[61801467]
WOS研究方向Engineering ; Optics ; Physics
语种英语
WOS记录号WOS:000566336300002
资助机构Independent project of robotics and intelligent manufacturing innovation institute, Chinese Academy of Sciences (C2019001) ; National Natural Science Foundation of China (NSFC) (61804160, 61801467)
源URL[http://ir.sia.cn/handle/173321/27179]  
专题沈阳自动化研究所_光电信息技术研究室
通讯作者Qi F(祁峰)
作者单位1.Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang, Liaoning 110016
2.Institutes for Robotics and Intelligent Manufacturing, Chinese Academy of Sciences, Shenyang, Liaoning 110169
3.State Grid Liaoning Electric Power Company Limited Economic Research Institute, Shenyang Liaoning, China, 110015
4.University of Chinese Academy of Sciences, Beijing, 100049 China
5.Key Laboratory of Image Understanding and Computer Vision, Shenyang, Liaoning 110016 China
6.Key Laboratory of Opto-Electronic Information Process, Shenyang, Liaoning 110016 China
推荐引用方式
GB/T 7714
Liu DY,Lu TQ,Qi F. A Reliable Method for Removing Fabry-Perot Effect in Material Characterization with Terahertz Time-Domain Spectroscopy[J]. IEEE Transactions on Terahertz Science and Technology,2020,10(5):443-452.
APA Liu DY,Lu TQ,&Qi F.(2020).A Reliable Method for Removing Fabry-Perot Effect in Material Characterization with Terahertz Time-Domain Spectroscopy.IEEE Transactions on Terahertz Science and Technology,10(5),443-452.
MLA Liu DY,et al."A Reliable Method for Removing Fabry-Perot Effect in Material Characterization with Terahertz Time-Domain Spectroscopy".IEEE Transactions on Terahertz Science and Technology 10.5(2020):443-452.

入库方式: OAI收割

来源:沈阳自动化研究所

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