中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Tuning mechanical and corrosion performance of SiOC glass coatings prepared by thermal MOCVD

文献类型:期刊论文

作者Liu, Housheng1,2; Tariq, Naeem ul Haq3; Jing, Weichen1,2; Cui, Xinyu2; Tang, Mingqiang2; Xiong, Tianying2
刊名JOURNAL OF NON-CRYSTALLINE SOLIDS
出版日期2022-03-01
卷号579页码:7
ISSN号0022-3093
关键词SiOC coatings MOCVD Hardness and modulus HF etch resistance
DOI10.1016/j.jnoncrysol.2021.121378
通讯作者Tang, Mingqiang(mqtang@imr.ac.cn) ; Xiong, Tianying(tyxiong@imr.ac.cn)
英文摘要In this study, silicon oxycarbide (SiOC) glass coatings were successfully deposited by thermal metal organic chemical vapor deposition (MOCVD). The composition, chemical bonding and mechanical properties of the prepared SiOC glass coatings were studied using X-ray photoelectron spectroscopy (XPS) and nano indentation techniques. The surface morphologies of SiOC coatings were characterized by field emission scanning electron microscopy (FESEM) before and after etching with HF acid for prolong time. The results showed that the percentage of Si-C bonds in SiOC glass coatings increases with increasing the content of HMDS in liquid precursors mixture. Raman spectroscopy results revealed the presence of amorphous carbon (with high content of sp3 bonds) in the prepared SiOC coatings. Consequently, the hardness and modulus of SiOC glass coatings increased from 8.99 GPa and 82.6 GPa to 17.93 GPa and 195.6 GPa, respectively. Further, the prepared SiOC glass coatings exhibited excellent corrosion resistance against HF acid.
资助项目National Key Research and Development Project[2019YFB2005302]
WOS研究方向Materials Science
语种英语
出版者ELSEVIER
WOS记录号WOS:000754680200001
资助机构National Key Research and Development Project
源URL[http://ir.imr.ac.cn/handle/321006/173336]  
专题金属研究所_中国科学院金属研究所
通讯作者Tang, Mingqiang; Xiong, Tianying
作者单位1.Univ Sci & Technol China, Sch Mat Sci & Engn, Shenyang 110016, Peoples R China
2.Chinese Acad Sci, Shi Changxu Innovat Ctr Adv Mat, Inst Met Res, Shenyang 110016, Peoples R China
3.Pakistan Inst Engn & Appl Sci, Dept Met & Mat Engn, Islamabad, Pakistan
推荐引用方式
GB/T 7714
Liu, Housheng,Tariq, Naeem ul Haq,Jing, Weichen,et al. Tuning mechanical and corrosion performance of SiOC glass coatings prepared by thermal MOCVD[J]. JOURNAL OF NON-CRYSTALLINE SOLIDS,2022,579:7.
APA Liu, Housheng,Tariq, Naeem ul Haq,Jing, Weichen,Cui, Xinyu,Tang, Mingqiang,&Xiong, Tianying.(2022).Tuning mechanical and corrosion performance of SiOC glass coatings prepared by thermal MOCVD.JOURNAL OF NON-CRYSTALLINE SOLIDS,579,7.
MLA Liu, Housheng,et al."Tuning mechanical and corrosion performance of SiOC glass coatings prepared by thermal MOCVD".JOURNAL OF NON-CRYSTALLINE SOLIDS 579(2022):7.

入库方式: OAI收割

来源:金属研究所

浏览0
下载0
收藏0
其他版本

除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。