Tuning mechanical and corrosion performance of SiOC glass coatings prepared by thermal MOCVD
文献类型:期刊论文
作者 | Liu, Housheng1,2; Tariq, Naeem ul Haq3; Jing, Weichen1,2; Cui, Xinyu2; Tang, Mingqiang2; Xiong, Tianying2 |
刊名 | JOURNAL OF NON-CRYSTALLINE SOLIDS |
出版日期 | 2022-03-01 |
卷号 | 579页码:7 |
ISSN号 | 0022-3093 |
关键词 | SiOC coatings MOCVD Hardness and modulus HF etch resistance |
DOI | 10.1016/j.jnoncrysol.2021.121378 |
通讯作者 | Tang, Mingqiang(mqtang@imr.ac.cn) ; Xiong, Tianying(tyxiong@imr.ac.cn) |
英文摘要 | In this study, silicon oxycarbide (SiOC) glass coatings were successfully deposited by thermal metal organic chemical vapor deposition (MOCVD). The composition, chemical bonding and mechanical properties of the prepared SiOC glass coatings were studied using X-ray photoelectron spectroscopy (XPS) and nano indentation techniques. The surface morphologies of SiOC coatings were characterized by field emission scanning electron microscopy (FESEM) before and after etching with HF acid for prolong time. The results showed that the percentage of Si-C bonds in SiOC glass coatings increases with increasing the content of HMDS in liquid precursors mixture. Raman spectroscopy results revealed the presence of amorphous carbon (with high content of sp3 bonds) in the prepared SiOC coatings. Consequently, the hardness and modulus of SiOC glass coatings increased from 8.99 GPa and 82.6 GPa to 17.93 GPa and 195.6 GPa, respectively. Further, the prepared SiOC glass coatings exhibited excellent corrosion resistance against HF acid. |
资助项目 | National Key Research and Development Project[2019YFB2005302] |
WOS研究方向 | Materials Science |
语种 | 英语 |
出版者 | ELSEVIER |
WOS记录号 | WOS:000754680200001 |
资助机构 | National Key Research and Development Project |
源URL | [http://ir.imr.ac.cn/handle/321006/173336] |
专题 | 金属研究所_中国科学院金属研究所 |
通讯作者 | Tang, Mingqiang; Xiong, Tianying |
作者单位 | 1.Univ Sci & Technol China, Sch Mat Sci & Engn, Shenyang 110016, Peoples R China 2.Chinese Acad Sci, Shi Changxu Innovat Ctr Adv Mat, Inst Met Res, Shenyang 110016, Peoples R China 3.Pakistan Inst Engn & Appl Sci, Dept Met & Mat Engn, Islamabad, Pakistan |
推荐引用方式 GB/T 7714 | Liu, Housheng,Tariq, Naeem ul Haq,Jing, Weichen,et al. Tuning mechanical and corrosion performance of SiOC glass coatings prepared by thermal MOCVD[J]. JOURNAL OF NON-CRYSTALLINE SOLIDS,2022,579:7. |
APA | Liu, Housheng,Tariq, Naeem ul Haq,Jing, Weichen,Cui, Xinyu,Tang, Mingqiang,&Xiong, Tianying.(2022).Tuning mechanical and corrosion performance of SiOC glass coatings prepared by thermal MOCVD.JOURNAL OF NON-CRYSTALLINE SOLIDS,579,7. |
MLA | Liu, Housheng,et al."Tuning mechanical and corrosion performance of SiOC glass coatings prepared by thermal MOCVD".JOURNAL OF NON-CRYSTALLINE SOLIDS 579(2022):7. |
入库方式: OAI收割
来源:金属研究所
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