Micro Pressure Sensors Based on Ultra-thin Amorphous Carbon Film as both Sensitive and Structural Components
文献类型：会议论文
| 作者 | Tong, Xiaoshan; Zhao, Yulong; Ma, Xin; Guo, Peng; Zhang, Qi; Liu, Mingjie; Zhang, Dongliang; Wang, Aiying |
| 出版日期 | 2019 |
| 会议日期 | OCT 27-30, 2019 |
| 关键词 | DESIGN |
| 英文摘要 | Amorphous carbon(a-C) is a promising material for Micro Electro-mechanical System (MEMS) due to its significant piezoresistive effect, in-situ large-area deposition and outstanding mechanical performance. In this work, a micro pressure sensor based on ultra-thin sensitive film layers (a-C/Si3N4/SiO2) is proposed. In order to measure the micro pressure change, an ultra-sensitive rectangular a-C film piezo resistor with thickness of 300 nm, width of 300 mu m and length of 900 mu m and an ultra-thin rectangular sensitive structure with thickness of 785 nm, width of 400 mu m and length of 600 mu m are designed and fabricated. The simulation and testing results show that the resistance response of the ultra-thin film, with a linear relation of differential pressure, is highly sensitive. This work shows that a-C is a potential piezoresistive material for micro pressure change detection. |
| 会议录出版者 | IEEE Sensors |
| 学科主题 | Engineering ; Remote Sensing |
| ISSN号 | 1930-0395 |
| ISBN号 | 978-1-7281-1634-1 |
| 源URL | [http://ir.nimte.ac.cn/handle/174433/23300]  |
| 专题 | 会议专题 会议专题_会议论文 |
| 推荐引用方式 GB/T 7714 | Tong, Xiaoshan,Zhao, Yulong,Ma, Xin,et al. Micro Pressure Sensors Based on Ultra-thin Amorphous Carbon Film as both Sensitive and Structural Components[C]. 见:. OCT 27-30, 2019. |
入库方式： OAI收割
来源：宁波材料技术与工程研究所
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